原子磁传感器原子气室无磁控温技术  

Non-magnetic temperature control technology of atomic vapor cell in atomic magnetic sensors

作　　者：张鹏[1,2,3] 陈洪娟[1,2] 桂永雷 孙立凯[3] 邵志强[3] 崔洪亮[3] 

机构地区：[1]哈尔滨工程大学水声工程学院,黑龙江哈尔滨150001 [2]哈尔滨工程大学水声技术重点实验室,黑龙江哈尔滨150001 [3]中国电子科技集团公司第四十九研究所,黑龙江哈尔滨150001

出　　处：《传感器与微系统》2017年第6期18-21,25,共5页Transducer and Microsystem Technologies

基　　金：国家"863"高技术研究发展计划资助项目(2015AA8112005)

摘　　要：针对原子磁传感器碱金属原子气室对无磁加热的需求,解决磁力仪共振谱线信号信噪比低的问题,使用了差分对的布线方法,采用微加工膜工艺,在陶瓷基板上制备了方形纯铜材质的无磁加热线圈。使用COMSOL Multiphysics多物理场仿真软件分析了线圈在2.2 mA直流条件下产生的附加稳态磁场分布情况,结合Pro/Engineer软件构建的铜质气室固定支架及其热仿真分析结果,得到了比较理想的加热线圈固定位置。进一步分析确定了20 kHz交流加热方案,最终制作完成了具有3W加热功率和0.1℃控温精度的无磁加热器。实验结果表明:该加热器瞬时磁扰动为2.24 pT,满足原子气室无磁加热要求。其结果对原子磁传感器气室的设计及工作参数的优化改进具有一定的参考意义。Aiming at requirement of non-magnetic heating for atomic vapor cell of atomic magnetic sensor and solving the problem of low signal-to-noise ratio（ SNR） of resonant spectrum signal of magnetometer,a method of differential pair wiring is used and a square copper non-magnetic heating coil is fabricated on a ceramic substrate by adopting a micro-machined film process. Steady-state magnetic field intensity distribution of the coil is analyzed by COMSOL Multiphysics under 2. 2mA DC condition and combined with copper vapor cell fixed bracket model and thermal simulation analysis result from Pro/Engineer software are used to obtain the ideal heating position.Further analyze and determine on 20 kHz AC current heating program and complete non-magnetic heater with 3 W heating power and temperature control precision of 0. 1 ℃. The experimental results show that the instantaneous magnetic disturbance of the heater is 2. 24 pT,which satisfies the non-magnetic heating requirement of atomic vapor cell,and the result has reference meaning for vapor cell design and optimization of operation parameters of atomic magnetic sensor.

关 键 词：原子磁传感器 原子气室 无磁加热 加热线圈 磁扰动 

分 类 号：TP271[自动化与计算机技术—检测技术与自动化装置] O441.5[自动化与计算机技术—控制科学与工程]