一种四电极电导率传感器的研制与实验  

Development and Experiment of A Four-electrode Conductivity Sensor

作　　者：刘洋[1] 傅巍[1] 郑伟[1] 王洋洋[1] 程振乾[1] 秦浩[1] LIU Yang FU Wei ZHENG Wei WANG Yang-yang CHENG Zhen-qian QIN Hao(The 49th Research Institute of China Electronics Technology Group Corporation, Harbin 150001)

机构地区：[1]中国电子科技集团公司第四十九研究所,哈尔滨150001

出　　处：《环境技术》2017年第3期71-75,共5页Environmental Technology

摘　　要：采用高温共烧结技术制备将工作电极与激励电极热压并一次共烧成一体的电导敏感芯体,测量范围0~200μS/cm,精度小于±1.5%FS。介绍了该电导传感器的测量原理、电路方案、封装结构及工艺流程。通过对其进行性能实验,验证该传感器具有测量精度高的特定,并考核了传感器的长期稳定性。High Temperature Co-fired Ceramic （HTCC） is used to prepare a conductance sensitive core with a working electrode and an actuating electrode heated at one time. The range of measurement is 0--200 S/cm, and the accuracy was less than ±1.5 %FS. The measuring principle, circuit scheme, package structure and process flow of the conductance sensor experiments, the sensor is verified to be specific stability of the sensor. are introduced. By conducting the performance to the measuring precision and the long-term

关 键 词：四电极 电导率传感器 稳定性 共烧结工艺技术 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]