显微硬度计测试NiTi SMA薄膜与PZT基体结合力的分析  

The analysis of microhardness testing of bonding force of NiTi SMA thin films and PZT substrate

作　　者：何烜坤[1] 王金钢[1] HE Xuankun WANG Jingang(Center of Material Characterization of No. 46 research institute of China Electronics Technology Group Corporation, Tianjin 300220, Chin)

机构地区：[1]中国电子科技集团公司第四十六研究所质检中心,天津300220

出　　处：《材料研究与应用》2017年第2期132-134,140,共4页Materials Research and Application

摘　　要：通过磁控溅射在锆钛酸铅陶瓷(PZT)基体表面沉积一定面积的NiTi SMA薄膜,用显微硬度测试分析薄膜与PZT基体间的结合力.结果表明:随沉积膜宽度增加,NiTi SMA薄膜与PZT基体的结合力减小;膜宽L<3mm的NiTi SMA薄膜,其膜基结合力最高达351N/mm^2,比膜宽L≥3mm的结合力高2倍多.The NiTi SMA thin films were deposited on the surface of lead zirconate titanate ceramics （PZT） by magnetron sputtering, and the bonding properties between the films and PZT were analyzed by microhardness test. The results show that the bonding force of NiTi SMA film to PZT matrix is decreased with the increase of the width of the deposited film. The NiTi SMA film with film width L〈3 mm has a film-bound capacity of 351 N/mm2 , which is 2 times higher than film width L≥3 mm.

关 键 词：维氏硬度 NiTiSMA薄膜 PZT基体 结合力 

分 类 号：TB333[一般工业技术—材料科学与工程]