多弧离子镀(TiZr)N硬质膜的热震失效过程  

Thermal Shock Failure Process of (TiZr)N Hard Films Deposited by Multi Arc Ion Plating

作　　者：王建民[1] 张钧[2] 李阳[1] 孙丽婷[2] 刘冬玲[2] 

机构地区：[1]河北工程大学机电工程学院,河北邯郸056038 [2]沈阳大学机械工程学院,辽宁沈阳110044

出　　处：《材料保护》2017年第6期1-4,47,共5页Materials Protection

基　　金：辽宁省自然科学基金项目(2015020216);河北省科技计划项目(16211003D)资助

摘　　要：(TiZr)N膜层的热震性能对于(TiZr)N膜在刀具上的应用至关重要,目前此类研究还非常有限。采用多弧离子镀技术制备不同Ti/Zr原子比的3种(TiZr)N硬质反应膜,在600℃下采用水冷和空冷2种方式进行热震循环试验,考察了(TiZr)N硬质反应膜的成分、表面形貌和热震失效过程,讨论了表面形貌特别是表面液滴、膜层成分以及热震循环方式对(TiZr)N硬质反应膜热震性能的影响。结果表明:(TiZr)N膜层热震失效过程具有裂纹形成、裂纹扩展、形变区域形成并最终导致膜层脱落的特性;膜层中Zr含量增加,(TiZr)N膜层热震失效加剧;与空冷热震循环相比,水冷循环明显加剧了(TiZr)N膜层失效。Three kinds of （TiZr）N hard reactive films with different ratios of Ti/Zr were prepared by using multi arc ion plating technique.At 600 ℃,the thermal shock cycling tests in the two ways of water-cooling and air-cooling were carried out.The composition,surface morphology and thermal shock failing process of the as-deposited （TiZr）N films were evaluated,and the influences of surface morphology,especially the surface droplets,film composition and ways of thermal cycle tests on the thermal shock performance of the as-deposited （TiZr）N films were discussed in detail.Results showed that during the thermal shock failure process,the （TiZr）N film had the characteristics of crack formation,crack propagation,deformation zone formation and finally the film fallingoff.With the increase of Zr content in film,the thermal shock failure of （TiZr）N film became more serious.Besides,in the comparison of air-cooling thermal shock cycle,the water-cooling obviously aggravated the failure of （TiZr）N film.

关 键 词：(TiZr)N硬质膜 多弧离子镀 热震性能 表面形貌 

分 类 号：TG174.4[金属学及工艺—金属表面处理]