静态傅里叶变换光谱仪的微阶梯反射镜设计及制作  

Design and manufacture method of micro step reflector for static Fourier transform spectrometer

作　　者：张茗璇[1] 高教波[1] 孟合民[1] 张芳[1] 孙科峰[1] 范喆[1] 王希骋 

机构地区：[1]西安应用光学研究所,陕西西安710065

出　　处：《应用光学》2017年第4期644-648,共5页Journal of Applied Optics

基　　金：十三五项目

摘　　要：静态傅里叶变换光谱仪的反射镜采取微阶梯反射镜,使光谱仪可在无需空间驱动装置的前提下实现空域上各级次的同时采样。通过理论研究和对测试数据的对比分析,确定使用楔形玻璃条制作微阶梯反射镜。此方法采用常规光学零件加工工艺制作1个楔形玻璃块和10个楔形玻璃条,然后按序选取楔形玻璃条,并逐一光胶在楔形玻璃块的斜面上,且相邻楔形玻璃条的接触面用紫外胶固连;水平方向反复推动相邻后一个楔形玻璃条直到检测仪器测量出相邻楔形玻璃条的阶梯厚度差达到要求为止;用紫外灯固化紫外胶;重复以上步骤制作出所需台阶数目的微阶梯反射镜。和别的制作方法相比,此方法安全性和可行性高,而且具有一致性、台阶厚度可控特点,可制作出台阶高度误差为0.124μm、表面粗糙度为12nm的微阶梯反射镜,达到系统设计要求。The mirror of static Fourier transform spectrometer employs a micro stepped mirror, which allows the spectrometer to perform simultaneous sampling at various levels without a space driven device. Based on theoretical analysis and test data analysis and comparison, the method of u- sing wedge shaped glass strips is eventually determined to make micro stepped reflection mirror. This method uses general optical elements and process to manufacture 1 wedge shaped glass block and 10 wedge shaped glass strips, then selects wedge shaped glass strip by sequence and cements them on the cant of wedge shaped glass block one by one, and uses UV adhesive to cement contact surface of adjacent wedge shaped glass strips. Horizontally it repeatedly pushs adjacent wedge shaped glass strip and uses instrumentation to measure adjacent stepped thickness until meeting the requirements, then cures UV adhesive with UV light. Steps above are repeated to create a micro step mirror with required step number. Compared with other methods, this method is safe and feasi- ble, and has characteristics of consistency and step thickness controllable. It can be used to produce micro step mirror with height error of step only 0. 124 tLm and surface roughness 12 nm, satisfying system design requirements.

关 键 词：静态傅里叶变换光谱仪 迈克尔逊干涉仪 微阶梯反射镜 楔形玻璃条 

分 类 号：TN202[电子电信—物理电子学]