微型傅里叶变换光谱仪的研究进展  

Development of Micro Fourier Transform Spectrometer

作　　者：金伟华[1] 吕金光[2] 梁中翥[2] 秦余欣[2] 王维彪[2] 梁静秋[2] Jin Weihua Lv Jinguang Liang Zhongzhu Qin Yuxin Wang Weibiao Liang Jingqiu(Optoelectronics Technology Invention Examination Department, PECC, SIPO, Beijing 100083, China State Key Laboratory of Applied Optics, Changehun Ins titute of Optics, Fine Mechanics and Physics, Chinese Aeademy of Sciences, Changchun 130033,China)

机构地区：[1]国家知识产权局专利局专利审查协作北京中心光电部,北京100083 [2]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,长春130033

出　　处：《微处理机》2017年第3期52-59,共8页Microprocessors

基　　金：国家自然科学基金(61627819;61575193;61376122);吉林省科技发展计划(20150520101JH;20150101049JC;20150204072GX);应用光学国家重点实验室基金项目

摘　　要：傅里叶变换光谱仪由于具有高通量、多通道、高精确度、结构紧凑以及宽光谱范围等优点,可以对气体、液体或固体样品光谱进行十分有效的分析和测量。与体积、重量庞大的大型傅里叶变换光谱仪相比,微型化、轻量化且高精度的傅里叶变换光谱仪在应用上更为便利,是实现医疗检测、化学分析、环境监测以及空间探测等前沿基础研究领域现代化发展的重要仪器设备。介绍了时间调制和空间调制两种类型的微型傅里叶变换光谱仪的结构特点和关键技术,分析了设计与制作微型傅里叶变换光谱仪过程中存在的一些关键问题与难点,并总结了该领域的研究进展和发展趋势。Fourier transform spectrometer（FTS） is an interferential spectrometer with the characters of high accuracy,multi-channel,high flux,wide spectral range and structure compaction,which is an effective tool to measure and analyze the solid, liquid or gas sample spectrum. Recently, with the rapid growth of the demands in many areas such as chemical analysis,medicine testing, environmental monitoring and space detection, miniaturized, light-weight and high-precision FTS are strongly needed in comparison with that of the large volume and heavy weight, and it becomes an important instrument in frontier scientific research. An overview of the development of two kinds of micro FTS is presented. The key problems in designing and fabricating the FTS are discussed,and the progresses made worldwide in this field are also presented.

关 键 词：光谱仪 傅里叶变换 微型化 轻量化 时间调制 空间调制 光谱分辨率 

分 类 号：TP731[自动化与计算机技术—检测技术与自动化装置] O433.1[自动化与计算机技术—控制科学与工程]