Cu-Au-Ag三元去合金化制备纳米多孔金材料  

Preparation of nanoporous gold by dealloying the ternary Cu-Au-Ag alloy

作　　者：谭秀兰[1] 汪建[1] 冯林[2] 牛高[1] 曾勇[1] 罗江山[1] 

机构地区：[1]中国工程物理研究院激光聚变研究中心,四川绵阳621900 [2]西南科技大学材料科学与工程学院,四川绵阳621010

出　　处：《功能材料》2017年第7期7159-7162,7168,共5页Journal of Functional Materials

基　　金：中国工程物理研究院科学技术发展基金赞助项目(2013B0302052)

摘　　要：采用磁控溅射镀铜金银多层膜,经过长时间高温热处理合金化制备前驱体三元合金,以不同的酸溶液自由腐蚀去合金化去除合金中的铜元素和银元素,成功制备出纳米多孔金薄膜。采用扫描电镜和X射线能谱仪对去合金腐蚀前后样品的形貌和成分进行了分析。结果表明,400℃,36h热处理后铜金银多层膜完全合金化,获得了Au_3Ag_(28.5)Cu_(68.5)合金材料;FeCl_3+HCl溶液自由腐蚀去除铜可获得连续均匀的纳米尺寸孔隙结构,获得了几乎不含铜的样品;采用渐进浓度的硝酸自由腐蚀去合金化后去除银后获得了孔隙率约84%的纳米多孔金薄膜,其微观结构为连续的三维多孔结构,其系带尺寸10~35nm,并且20~25nm的系带分布达77%。The nanoporous gold film was synthesized by free corrosion dealloying Cu-Au-Ag precursor in the dissimilar acid solutions.The Cu,Au and Ag were prepared by magnetron sputter,respectively.The ternary CuAu-Ag precursor was an alloy of Cu,Au and Ag alloyed during the anneal process.Scanning electron microscope and energy dispersive analysis of X-ray are used to analyze the micro-structure and composition of the sample before and after dealloying.The results indicate that the Au_3Ag_(28.5)Cu_(68.5) alloy precursors formed at the condition of 400℃ heat-treatment for 36h.The nanoporous Au/Ag sample was obtained after the selective corrosion in the FeCl_3+HCl solutions.The increase concentration of HNO_3 is useful for preventing the surface cracking forming.The nanoporous gold samples with three-dimensional networks,ligament size of 10-35nm,porosity of 84% were obtained.

关 键 词：纳米多孔金 三元去合金化 Cu-Au-Ag 制备 

分 类 号：TG146.31[一般工业技术—材料科学与工程] O648[金属学及工艺—金属材料]