飞秒激光加工ZnS晶体沟槽形貌及其疏水性能研究  

Morphology and Hydrophobicity of ZnS Surface Fabricated by Femtosecond Pulse Laser

作　　者：宋雨欣 银恺[1,2] 董欣然[1,2] Song Yuxin Yin Kai Dong Xinran(State Key Laboratory of High Performance and Complex Manufacturing, Central South University, Changsha, Hunan 410083, China College of Mechanical and Electrical Engineering, Central South University, Changsha, Hunan 410083, China)

机构地区：[1]中南大学高性能复杂制造国家重点实验室,湖南长沙410083 [2]中南大学机电工程学院,湖南长沙410083

出　　处：《应用激光》2017年第3期398-402,共5页Applied Laser

基　　金：国家自然科学基金资助项目(项目编号:51335011;51475481;51475482);教育部"新世纪优秀人才支持计划"资助项目(项目编号NCET-12-0548);中南大学中央高校基本科研业务费专项资助项目

摘　　要：ZnS材料具有良好的光学和电学性能,是一种重要的半导体材料,在电学,光学和催化领域有巨大的应用前景。研究了飞秒激光能量和扫描速度对ZnS表面形貌及其疏水性能的影响规律。研究发现,随着激光能量增加沟槽深度和宽度增加,同时沟槽深度变化更为显著;扫描速度减小时,沟槽深度和宽度增加,沟槽边缘质量更好。在此基础上,研究了扫描速度对ZnS表面湿润特性的影响。实验结果表明,扫描速度越小,沟槽形貌越粗糙,其表面疏水性能更强,实验获得的最大疏水角为140°。ZnS is an important semiconductor material with good optical and electrical properties,which owns potential application in electrical,optical and catalytic areas.This paperillustratesthe influence of femtosecond pulse laser ablation on ZnS crystal surface morphology and hydrophobic propertyby adjusting the power and scanning speed of the laser.The result show that The groove depth and width increase with the increase of pulse laser power and the change of groove depth is greater than groove width when scribing ZnS substrate with femtosecond pulse laser.Besides,the groove depth and width increase and the quality of groove wall is better while the scanning speed decreases.Moreover,the influence of scanning speed on the hydrophobic property of ZnS surface has been studied.As the decrease of the scanning speed,the groove morphology becomes rougher and its hydrophobic property becomes better.The maximum contact angle measured in the experiments is 140°.

关 键 词：ZNS 飞秒激光 激光能量 扫描速度 表面形貌 疏水性能 

分 类 号：TN249[电子电信—物理电子学]