飞秒激光刻写全光纤马赫-泽德尔传感器件的研究进展  

The Research Progress of Femtosecond Laser Manufactured AllFiber Mach-Zehnder Interferometer (MZI) Sensors

作　　者：周楚[1] 胡友旺[1] 董欣然[1] 孙小燕[1] 罗志 褚东凯 银恺[1] 谢政[1] 周剑英[1] Zhou Chu Hu Youwang Dong Xinran Sun Xiaoyan Luo Zhi Chu Dongkai Yin Kai Xie Zheng Zhou Jianying(The State Key Laboratory of High Performance and Complex Manufacturing, Central South University, Changsha , Hunan 410083, China The Institute of Opt. , University of Rochester, Rochester, New York 14627, USA)

机构地区：[1]中南大学高性能复杂制造国家重点实验室,湖南长沙410083 [2]罗彻斯特大学光学研究所,纽约14627

出　　处：《应用激光》2017年第3期466-474,共9页Applied Laser

基　　金：国家自然科学基金资助项目(项目编号:51475482;51335011;51475481);国家重点基础研究发展计划资助项目(项目编号:2011CB013000);教育部"新世纪优秀人才支持计划资助项目(项目编号:NCET-12-0548)

摘　　要：与传统传感器相比,全光纤马赫泽德尔干涉仪(MZI)传感器,具有结构简单、分辨率高、稳定性好等优点,在石油化工、健康监测、生物化学等领域有广泛应用。介绍了MZI全光纤传感器的传感机理,对比了其他的加工方法,如电弧放电、加热拉伸、CO2激光诱导微变形等的优缺点,详细介绍了飞秒激光加工得到的MZI传感器的结构形式、折射率和温度等传感性能。重点阐述了飞秒激光加工MZI的研究现状和优点,并对运用飞秒激光方法加工的MZI进行了总结和展望。Compared with traditional sensors,all fiber MZI sensors have advantages of simple structure,high resolution,good stability and so on,which have a wide range of applications in petrochemical industry,health monitoring,biochemistry,and many other fields.This paper briefly introduces the sensing mechanism of all fiber MZI sensors and compared other machining methods,such as Arc discharge,Heating and drawing and CO2 laser induced micro deformation,and the sensing performances including structure form,the refractive index and temperature sensing properties of Femtosecond laser manufactured MZI sensors are also detail introduced.The advantages and research status of femtosecond laser manufactured MZI sensors are reviewed,and the production of MZI sensors used the femtosecond laser method is summarized and prospected.

关 键 词：飞秒激光 全光纤MZI传感器 传感特性 

分 类 号：TN249[电子电信—物理电子学]