高功率固体激光器中大口径光学器件波前误差的建模及控制方法  

Wavefront Error Modeling and Control Method for Large Aperture Optical Unit in High Power Solid-State Laser

作　　者：姚超[1] 王辉[1] 张政[1] 刘天野[1] 

机构地区：[1]清华大学机械工程系,北京100084

出　　处：《光学学报》2017年第7期167-177,共11页Acta Optica Sinica

基　　金：国家自然科学基金(51575310)

摘　　要：从惯性约束聚变系统高功率固体激光驱动器中具有典型意义的大口径激光传输反射镜的装配结构及其面形精度特点出发,对其波前误差进行了精细化建模分析,分别研究了粗糙度、纹波度和轮廓度的波前误差模型。在此基础上,进一步针对如何在装校过程中将装配应力产生的波前误差控制在合理范围内的问题,提出了方均根梯度与峰谷值相结合的波前误差评价和控制方法,并通过实验验证了其可行性,以期为我国神光-III主机装置大口径反射镜装校过程中波前误差控制提供科学指导方法。The fine modeling analysis of wavefront error is carried out based on assembly structure and profile accuracy characteristic of typical large aperture laser transmission mirror in high power solid-state laser driver of inertial confinement fusion system.Wavefront error models of roughness,ripple and profile are studied.To control the wavefront error caused by mounting force in assembly process within a reasonable range,a method combined rootmean-square（RMS）gradient and peak-to-valley（PV）value is proposed.Experiments are carried out to verify the feasibility of the proposed method.The study provides scientific instruction for wavefront error control in assembly process of large aperture mirror in SG-III host device.

关 键 词：激光器 高功率固体激光器 大口径反射镜 波前误差 精密装配 均方根梯度 

分 类 号：TH161[机械工程—机械制造及自动化] TN242[电子电信—物理电子学]