基于V形纳米天线的平面透镜设计与制备  

Design and Preparation of Planar Lens Based on V-Shaped Nanoantennas

作　　者：焦蛟[1,2] 罗先刚[2] 赵青[1] 

机构地区：[1]电子科技大学物理电子学院,四川成都610054 [2]中国科学院光电技术研究所微细加工光学技术国家重点实验室,四川成都610209

出　　处：《光学学报》2017年第7期249-255,共7页Acta Optica Sinica

基　　金：国家973计划(2013CBA01700);国家自然科学基金(61138002;11275045)

摘　　要：传统透镜由于其体积大、性能差等因素的制约,使其在微纳光学系统中的应用遇到挑战。金属纳米结构能够耦合自由光波产生表面等离子体激元,通过控制表面等离子体激元来实现对入射光波的调控。V形等离子体纳米天线凭借其双共振效应以及0~2π的全相位调谐范围,使其在可以实现光束调控的金属纳米结构中脱颖而出。首先基于V形纳米天线设计了可以在34μm处高效聚焦的超透镜;接着利用聚焦电子束和光刻工艺制备样品;最后对样品进行表征分析与光学检测。这些工作将促进V形纳米天线在激光直写、光学集成方面的应用。Conventional lens encounters challenges in the application of micro-nano optical system due to its big volume and poor performance.While metallic nanostructure can couple the free light wave to produce surface plasmon polaritons.And we can adjust and control the incident light wave by controlling the surface plasmon polaritons.Vshaped plasmonic nanoantenna stands out among the metallic nanostructures which are able to realize beam controlling because of its double resonant effect and comprehensive phase tuning range of 0-2π.Firstly,based on the V-shaped nanoantenna,a super lens which can realize high efficient focus at 34μm is designed.Then by using focused electron beam and photolithography technique,the samples are prepared.Finally,the characterization analysis and optical detection of the samples are carried out.These works have the potential to promote the applications of V-shaped nanoantenna in laser direct writing and optical integration.

关 键 词：表面光学 表面等离子体 V形纳米天线 光束调控 电子束 

分 类 号：O436[机械工程—光学工程]