热膜式气体流量传感器异物污染流场仿真分析  

Simulation Analysis of Flow Field on Polluted Hot-film Airflow Sensor

作　　者：袁昌荣[1] 孙中圣[1] 李小宁[1] 

机构地区：[1]南京理工大学机械工程学院,江苏南京210094

出　　处：《机械制造与自动化》2017年第4期89-91,共3页Machine Building & Automation

基　　金：国家自然科学基金资助项目(51475242)

摘　　要：为研究MEMS热膜式流量传感器异物污染后的测量精度变化与污染程度的关系,通过试验分析了芯片表面污染物分布情况,建立了异物堆积模拟示意图。采用fluent流体分析软件,研究了异物堆积后MEMS芯片表面流速的变化。通过分析可知,当有异物堆积时,芯片表面附近区域流速会发生变化,比无异物堆积时变小,且速度差随入口速度的增加而增加。To study the relationship between the change of the measurement accuracy of polluted MEMS hot-film flow sensor and its polluted degree,this paper analyzes the distribution of pollutants on chip surface by experiments,establishes the schematic drawing of pollutant deposition.and uses fluent software to study.The velocity change around MEMS chip surface with pollutants.The results show that the velocity change around the chip surface with pollutants is smaller than that without pollutants.The difference of velocity increases with the increase of inlet velocity.

关 键 词：气动 MEMS热膜式流量传感器 异物堆积 流速变化 

分 类 号：TP391.9[自动化与计算机技术—计算机应用技术]