膜层厚比对CrN_x/Ti_yCr_(1-y)N多层膜硬度与结合力影响研究  

Influence of CrN_x/Ti_yCr_(1-y)N Multilayer Thickness on Hardness and Binding Force

作　　者：张昕[1] 温培刚[2] 

机构地区：[1]北京机械工业自动化研究所,北京100120 [2]中国航发北京航空材料研究院,北京100095

出　　处：《航空制造技术》2017年第14期54-56,67,共4页Aeronautical Manufacturing Technology

摘　　要：为研究膜层交替周期对多层膜表面硬度与耐磨性能的影响,利用金属蒸发真空弧离子源(MEVVA)和磁过滤阴极真空弧复合离子束沉积技术在AM355钢材表面制备膜层交替周期分别为5、13和26的3组CrN_x/Ti_yCr_(1-y)N膜层,利用场发射扫描电子显微镜(FESEM)和X射线衍射仪(XRD)对膜层形貌和相结构进行了分析,利用划痕仪、显微硬度计等对膜层硬度与结合力进行了测试。结果表明:采用该技术制备的CrN_x/Ti_yCr_(1-y)N多层膜结构致密,与基体结合良好;随着多层膜交替周期的增加,膜层硬度有所降低,膜层结合力则呈现先升高后缓慢降低的趋势。In order to investigate the influence of laminate periodicity on hardness and wearability, CrNx/TiyCr1-yN coatings with 5, 13 and 26 periodic multilayer are prepared on AM355 steel substrate by metal evaporation vacuum arc ion source（MEVVA） and filter cathodic vacuum arc deposition technology. The morphology and phase structure of coatings are observed and analyzed by field emission scanning electron microscope（FESEM） and X-ray diffraction（XRD） respectively. The hardness of coating is tested by microhardness tester and the bond strength is measured by scratch tester. The results show that CrNx/TiyCr1-y coatings with multilayer have dense structure and good bond strength. With the increase of laminate periodicity, the hardness of multilayer decreases while the bond strength shows a trend of increasing at first and slowly lower later.

关 键 词：多层膜交替周期 硬度 结合力 

分 类 号：TG174.4[金属学及工艺—金属表面处理]