Φ4m口径凹抛物面镜折反零位补偿检验  

Catadioptric null compensation test of a concave paraboloidal mirror with 4m aperture

作　　者：胡文琦[1,2] 叶璐[2] 何勇[1] 郑列华[2] HU Wenqi YE Lu HE Yong ZHENG Liehua(School of Electronic and Optical Engineering, Nanjing University of Science and Technology Nanjing 210094, China Shanghai Institute of Technical Physics of the Chinese Academy of Sciences, Shanghai 200083, China)

机构地区：[1]南京理工大学电子工程与光电技术学院,江苏南京210094 [2]中国科学院上海技术物理研究所,上海200083

出　　处：《量子电子学报》2017年第4期394-399,共6页Chinese Journal of Quantum Electronics

基　　金：国家重点基础研究发展计划;2011CB013206~~

摘　　要：折反射式零位补偿检验是一种综合了Offner折射式和Maksutov反射式补偿检验优点的凹非球面检验方法,补偿能力强,检测光路紧凑。大口径和大相对孔径非球面检验是制约其加工质量提高的难题,针对口径为4 m、偏心率为1、顶点曲率半径为16 m的大口径凹抛物面反射镜,设计了折反射式零位补偿器。基于三级像差理论对补偿器的初始结构进行了规划和计算,采用Zemax软件对初始结构参数进行了优化,得出了补偿器的最终结构,检验光路轴向尺寸约12 m,系统优化后剩余波相差为0.005λ。设计和仿真结果表明,这种折反射式零位补偿器对大口径凹非球面镜的加工检测是非常有利的。Catadioptric null compensation test is a novel concave aspheric mirror testing method which combines the advantages of Offner refractive and Maksutov reflective compensation test. Its compensation ability is strong and testing optical path is compact. Non-spherical test with large aperture and large relative aperture is a difficult problem to restrict the improvement of its processing quality. In view of a concave paraboloidal reflector whose aperture is 4 m, eccentricity ratio is 1, and vertex curvature radius is 16 m, a catadioptric null compensator is designed. Based on the third-order aberration theory, the arrangement and calculation of the compensator initial structure is carried out. The initial structure parameters are optimized with Zemax, and the finial structure of compensator is obtained. The axial size of testing optical path is about 12 m. The residual wave phase error is 0.005A simulation results show that the catadioptric null compensator testing of large aperture concave aspheric mirrors after system optimization. The design and is very advantageous for the processing and testing of large aperture concave aspheric mirrors.

关 键 词：几何光学 大口径非球面检验 折反射式零位补偿检验 三级像差理论 光学系统设计 

分 类 号：O435[机械工程—光学工程]