Surface plasmon-enhanced dual-band infrared absorber for VO_x-based microbolometer application  

作　　者：李琦 于兵强 李兆峰 王晓峰 张紫辰 潘岭峰 

机构地区：[1]Guangxi Key Laboratory of Precision Navigation Technology and Application,Guilin University of Electronic Technology [2]School of Microelectronics, University of Chinese Academy of Sciences [3]State Key Laboratory of Superlattices and Microstructures, Institute of Semiconductors,Chinese Academy of Sciences [4]Institute of Semiconductors, Chinese Academy of Sciences [5]Institute of Microelectronics, Chinese Academy of Sciences [6]Tsinghua University

出　　处：《Chinese Physics B》2017年第8期265-270,共6页中国物理B（英文版）

基　　金：supported by the One Hundred Talents Program of the Chinese Academy of Sciences;the National Natural Science Foundation of China(Grant Nos.61376083 and 61307077);the China Postdoctoral Science Foundation(Grant Nos.2013M530613 and 2015T80080);the Guangxi Key Laboratory of Precision Navigation Technology and Application(Grant Nos.DH201505,DH201510,and DH201511)

摘　　要：We propose a periodic structure as an extra absorption layer（i.e., absorber） based on surface plasmon resonance effects, enhancing dual-band absorption in both middle wavelength infrared（MWIR） and long wavelength infrared（LWIR）regions. Periodic gold disks are selectively patterned onto the top layer of suspended SiN/VO_2/SiN sandwich-structure.We employ the finite element method to model this structure in COMSOL Multiphysics including a proposed method of modulating the absorption peak. Simulation results show that the absorber has two absorption peaks at wavelengths λ =4.8 μm and λ = 9 μm with the absorption magnitudes more than 0.98 and 0.94 in MWIR and LWIR regions, respectively. In addition, the absorber achieves broad spectrum absorption in LWIR region, in the meanwhile, tunable dual-band absorption peaks can be achieved by variable heights of cavity as well as diameters and periodicity of disk. Thus, this designed absorber can be a good candidate for enhancing the performance of dual band uncooled infrared detector, furthermore, the manufacturing process of cavity can be easily simplified so that the reliability of such devices can be improved.We propose a periodic structure as an extra absorption layer（i.e., absorber） based on surface plasmon resonance effects, enhancing dual-band absorption in both middle wavelength infrared（MWIR） and long wavelength infrared（LWIR）regions. Periodic gold disks are selectively patterned onto the top layer of suspended SiN/VO_2/SiN sandwich-structure.We employ the finite element method to model this structure in COMSOL Multiphysics including a proposed method of modulating the absorption peak. Simulation results show that the absorber has two absorption peaks at wavelengths λ =4.8 μm and λ = 9 μm with the absorption magnitudes more than 0.98 and 0.94 in MWIR and LWIR regions, respectively. In addition, the absorber achieves broad spectrum absorption in LWIR region, in the meanwhile, tunable dual-band absorption peaks can be achieved by variable heights of cavity as well as diameters and periodicity of disk. Thus, this designed absorber can be a good candidate for enhancing the performance of dual band uncooled infrared detector, furthermore, the manufacturing process of cavity can be easily simplified so that the reliability of such devices can be improved.

关 键 词：surface plasmon resonance effects dual-band absorption vanadium oxide uncooled infrared detector 

分 类 号：TN21[电子电信—物理电子学] TP212[自动化与计算机技术—检测技术与自动化装置]