激光诱导沉积高粘度银浆制备微结构的研究  

High-viscosity silver paste deposited by laser induced forward transfer

作　　者：李洪辉[1] 黄志刚[1] 杨青天 邓宇[1] 

机构地区：[1]广东工业大学特种能场加工实验室,广东广州510006

出　　处：《激光与红外》2017年第8期943-947,共5页Laser & Infrared

基　　金：国家自然科学基金项目(No.11172072);国家自然科学基金项目(No.51175091)资助

摘　　要：激光诱导向前转移是近些年来兴起的一种微加工技术,可以用来转移金属材料、生物材料和各向异性材料等。进行了利用纳秒激光诱导沉积高粘度导电银浆的实验研究,并对接收层上沉积的银浆进行观察分析,探讨了激光脉冲能量和与接收层的距离对沉积效果的影响,分析了沉积过程,沉积出连续银浆导线,并分析其导电特性。实验发现,当激光脉冲能量为87μJ,与接收层的距离为40μm时,沉积点均匀稳定,直径为一百多微米。通过调节三维平台带动靶材移动,用交叉打点的方法进行沉积,可制备出连续银浆导线,导线的宽度约100μm,电阻率达6.12×10^(-8)Ωm,与靶材的电阻率相差不大,可以用于微电路和微传感器等的制备。一维线状连续微结构的成功制备,为以后沉积二维微结构,甚至三维结构奠定了基础。Laser induced forward transfer（ LIFT） is a micro fabrication technology arising in the recent decades, which has been successfully applied in the transfer of materials including metal, biological and anisotropic materials. An ex-perimental research on the LIFT of high-viscosity conductive silver paste was carried out. The deposited silver paste on acceptor was observed and analyzed. And the effect of pulse energy and donor-acceptor distance on experimental re-sults was discussed, and conduction characteristics of silver paste were analyzed. The experimental results show that when laser pulse energy and donor-acceptor distance is 87 jjl J and 40 jjim, respectively, the silver paste is uniform, sta-ble and about 100 jjim in diameter. By adjusting the three-dimensional platform with moving donor and depositing al-ternately^ continuous line of silver paste is achieved successfully. The width of line is about 100 jjim,and the resistiv-ity is 6. 12 x 10 8 fim. It is expected that the method can be applied in the fabrication of micro-circuit and micro cir-cuits. One dimensional linear continuous micro-structure has been fabricated successfully, which lays the foundation for fabrication of two dimensional micro-structure, even three dimensional micro-structure in the next work.

关 键 词：激光诱导向前转移 高粘度银浆 微结构 电阻率 

分 类 号：TN249[电子电信—物理电子学]