四极质谱仪真空系统设计  

Design of vacuum system for quadrupole mass spectrometer

作　　者：赵加鹏[1] 龙希伟[1] 宋春丽[1] 李芳[1] 陈宁[1] ZHAO Jia-peng LONG Xi-wei SONG Chun-li LI Fang CHEN Ning(The 718 Research Institute of CSIC, Handan 056027, China)

机构地区：[1]中国船舶重工集团公司第七一八研究所,河北邯郸056027

出　　处：《真空》2017年第4期13-17,共5页Vacuum

摘　　要：四极质谱仪作为科学分析仪器中的高端产品,具有广泛的应用领域。仪器工作时需要处于高真空状态,同时还需从大气压下引入样品进行分析。本文采用两级梯度真空的设计方法对真空系统进行设计,解决了分析样品进样的真空过渡。通过流导、漏率等方面计算以及真空系统的要求确定了各真空元器件的结构形式和规格型号。最后,搭建真空系统进行了实验验证。As a high-end product for scientific analysis,quadrupole mass spectrometer has a wide range of application areas.The instrument needs to work at a high vacuum condition, while it is necessary to load the sample from atmospheric pressure. In this paper, the vacuum system is designed into two stage gradient chamber for the vacuum transition of loading analytic samples.The structure and specification of the vacuum components were determined based on the calculation of flow guide, leak rate and other requirements of the vacuum system. A vacuum system was finally built to verify the design.

关 键 词：四极质谱仪 梯度真空 真空系统 流导 漏率 

分 类 号：TB773[一般工业技术—真空技术]