基于钽酸锂晶体材料镍铬薄膜在14～16μm波段红外增强吸收特性（英文）  

Enhanced infrared absorption of NiCr Film fabricated on LiTaO_3 crystal material for 14～16 μm application

作　　者：刘子骥[1] 梁志清[1] 何璇[1] 马振东[1] 苟军[1] 蒋亚东[1] 

机构地区：[1]电子科技大学电子薄膜与集成器件国家重点实验室,四川成都610054

出　　处：《红外与毫米波学报》2017年第4期389-392,共4页Journal of Infrared and Millimeter Waves

基　　金：Supported by National Science Funds for Creative Research Groups of China(61421002);National Natural Science Foundation of China(61405027);the Postdoctoral Science Foundation of China(2014M562296);Fundamental Research Funds for the Central Universities(ZYGX2011X012)

摘　　要：纳米级金属薄膜能够作为热释电探测器红外吸收薄膜在14~16μm波段范围内有效应用已经得到证明.通过调节沉积在LT(钽酸锂)晶体材料上的纳米级镍铬(NiCr)薄膜的厚度和表面特征来改善纳米金属薄膜红外吸收特性.通过调节晶体材料的厚度,改变抗反射腔的深度,从而调节吸收波长.为进一步加强红外吸收,应用化学腐蚀,生成粗糙的纳米级薄膜表面结构,从而极大程度上增加吸收表面积.通过将这两种方法结合,可以明显增强指定波段的红外吸收,且其制造过程完全兼容,易于实现.可控的吸收性能的实验结果与仿真和设计情况相符合.Nano-scale metallic films have been proven to be effective infrared absorption layers for pyroelectric detectors operated at 14 - 16 μm spectral range for space applications. The infrared absorption improvement can be achieved by adjusting the thickness and surface characteristics of the nano-scale Nickel-chromium （NiCr） film deposited on the LT （lithium tantalite） crystal materials. By regulating the thickness of the crystal materials, the absorption wavelength is adjustable as well by changing the depth of the anti-reflection cavity. To enhance the infrared absorption further, chemi- cal corrosion is applied on this film, which generates a rough nano-scale surface structure and greatly increases the ab- sorption surface area. By combining these two methods, absorption at specified infrared wavelength could be distinctly enhanced, and the manufacturing process is fully compatible and easy to realize. Experiment results suggest that the ab- sorption performance which could be controlled agrees well with the simulation and design.

关 键 词：NICR 热释电探测器 纳米金属薄膜 化学腐蚀 红外吸收 

分 类 号：O551[理学—热学与物质分子运动论] O782[理学—物理]