MOEMS集成波长选择开关的设计及研究  

Design and Study of MOEMS Integrated Wavelength Selective Switches

作　　者：时建[1,2] 梁静秋[1] 陈成[1] 吕金光[1] 秦余欣[1] 高丹[1,2] Shi Jian Liang Jingqiu Chen Cheng Lti Jinguang Qin Yuxin Gao Dan(State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science, Changchun 130033, China University of Chinese Academy of Sciences, Beijing 100049, China)

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,长春130033 [2]中国科学院大学,北京100049

出　　处：《微纳电子技术》2017年第9期597-604,626,共9页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(60578036);吉林省科技发展计划资助项目(20080343);广东省省级科技计划资助项目(2016B010111003)

摘　　要：研究一种基于电磁驱动微光机电系统(MOEMS)光开关阵列的串联集成波长选择开关结构,经过理论分析与计算,得出螺旋形线圈在相同电流密度下相比于八边形和四边形线圈能得到更大的电磁力;通过模态分析得到在设计的悬臂结构下,支撑臂响应时间约为22 ms。采用溅射、光刻、腐蚀和电铸等MOEMS工艺完成了光开关悬臂的制作,并通过制作对准标记及采用可见光与红外光相结合的装调方法,完成了1×8阵列的波长选择开关系统集成。经过测试得到,开关上升和下降的时间均约为20 ms,当电流为0.4 A时,支撑臂的挠度为1.28 mm,能达到系统光路转换的目的。该波长选择开关能够在2 V电压下,实现对8个不同波长信道的任意选择,其最大的插入损耗为1.741 dB,信道均匀性达到0.55 dB;插入损耗的测试结果与计算结果较吻合。A series structure integrated wavelength selective switch based on electromagnetic drive micro-optical electromechanical system （MOEMS） optical switch array was studied. Theoretical analysis and calculation shows that the spiral coil can obtain more electromagnetic force than the octagonal and quadrilateral coils at the same current density. Through the modal analysis, the response time of about 22 ms of the support arm for the designed cantilever structure was obtained. The optical switch cantilever was fabricated by MOEMS technology, such as sputte- ring, photolithography, etching and electroforming. By making the alignment mark, the 1 × 8 array wavelength selective switch system integration was completed with the aligning and installing methods combing with visible and infrared lights. The test results show that the rise time and fall time of the switch are both about 20 ms. The deflection of the support arm is 1.28 mm at the current of 0.4 A, which satisfies the demand of system optical path conversion. The wavelength selective switch can achieve arbitrary selection of eight different wavelength channels at 2 V voltage. The maximum insertion loss is 1. 741 dB and the channel uniformity reaches 0.55 dB. The test results of the insertion loss are in good agreement with its calculated results.

关 键 词：波分复用 波长选择开关 微光机电系统(MOEMS) 光通信 电磁驱动 

分 类 号：TN256[电子电信—物理电子学] TH703[机械工程—仪器科学与技术]