应用于激光诱导荧光检测的微透镜阵列  

Microlens Array Applied for Laser Induced Fluorescence Detection

作　　者：张学海[1] 刘冲[2] 梁超[1] 孟凡健 李经民[2] 

机构地区：[1]大连理工大学机械工程学院,辽宁大连116024 [2]大连理工大学辽宁省微纳米技术及系统重点实验室,辽宁大连116024

出　　处：《激光与光电子学进展》2017年第8期75-81,共7页Laser & Optoelectronics Progress

基　　金：国家自然科学基金面上项目(51375076;51475079);国家自然科学基金创新研究群体项目(51621064)

摘　　要：基于激光诱导荧光检测技术的微流控系统广泛应用于生物化学检测领域。针对微流控系统中检测样本较少,诱导荧光强度较弱的问题,设计并制作了一种集成有微透镜阵列(MLA)的微流控芯片来提高荧光检测强度。采用热熔技术制备直径变异系数为0.36%的8×8光刻胶微透镜阵列模具。采用软光刻工艺,制造集成有聚二甲基硅氧烷微透镜阵列的盖片,焦距均匀性误差为7%。制造具有微通道的基片,并采用氧等离子键合技术封装盖片和基片。将浓度为10μmol·L^(-1)的异硫氰酸荧光素荧光染料溶液注入微流控芯片,利用荧光显微镜检测芯片的荧光强度。结果表明,透镜处的荧光强度比无透镜时提高了约2.2倍。Microfluidic systems based on laser induced fluorescence （LIF） detection technology have been widely used in the field of biochemistry detection. Aiming at the problem of weak fluorescence intensity induced by a few detection samples in the microfluidic system, a microfluidic chip integrating a microlens array （MLA） is designed and fabricated to improve the intensity of the detected fluorescence. An 8 × 8 photoresist MLA mold with the diameter variation coefficient of 0.36% is obtained by the hot melt technology. Then, a cover plate integrating a polydimethylsiloxane MLA is produced by the soft-lithography technology, and the focal length uniformity error is 7 %. Afterwards, a micro-channel substrate is made. The substrate and the cover plate are packaged by the oxygen plasma bonding technology. Finally, the fluorescence intensity of the chip is detected by a fluorescence microscope, and the chip is injected by fluorescein isothiocyanate fluorescent dye solution with concentration of 10 μmol·L^-1. The result shows that the fluorescence intensity with the microlens is improved about 2.2 times as much as the fluorescence intensity without the microlens.

关 键 词：探测器 微透镜阵列 热熔法 荧光检测 聚二甲基硅氧烷 

分 类 号：TN405[电子电信—微电子学与固体电子学]