基于SAW器件的微间隙压力监测传感器  

SAW Sensors for Monitoring Pressure in Micro-Gaps

作　　者：王俊[1] 李媛媛[1] 卢文科[2] 

机构地区：[1]上海工程技术大学电子电气工程学院,上海201620 [2]东华大学信息科学与技术学院,上海201620

出　　处：《传感技术学报》2017年第5期660-666,共7页Chinese Journal of Sensors and Actuators

基　　金：上海工程技术大学研究生科研创新项目(E3-0903-16-01182);16KY0212柔性阵列式声表面波微力传感器的研究项目;国家自然科学基金项目(61274078);多尺度声表面波式指条面积加权的小波变换处理器及小波反变换处理器的研究项目;中国纺织工业联合会的"纺织之光"应用基础研究项目(J201608);用声表面波器件实现纱线张力传感器的研究项目

摘　　要：声表面波SAW(Surface Acoustic Wave)器件能进行无源无线通信,为微间隙等特殊环境下物理量的测量提供了新的解决思路。研究设计了一种基于声表面波延迟线的接触应力传感器。围绕微间隙环境,研究了声表面波器件的结构类型,并确定压力监测的技术方案;根据设计原理,设计一种新型声表面波传感器,并利用有限元分析法对压电基片进行应力仿真;将设计出的传感器进行实验测试并提出温度补偿。通过对声表面波传感器设计的探究,验证了利用声表面波传感器实现微间隙压力监测的可行性。Surface acoustic wave （SAW）device can be used for passive wireless communication, which provides a new solution for measurement of physical quantity under special environment such as micro-gaps. A contact stress sensor based on surface acoustic wave delay line is designed. The structure of SAW device is studied, and the sensing scheme of measuring pressure is discussed. According to the design principle, we design a new type of SAW sensors, and stress simulations of piezoelectric substrate are presented by using finite element analysis method. Then the sensors are tested and temperature compensation of SAW sensors is proposed. By exploring the design of SAW sensors, results show that feasibility of measuring pressure in micro-gaps based on SAW is verified.

关 键 词：声表面波 无源无线 微间隙 有限元分析 应力仿真 

分 类 号：TP212.6[自动化与计算机技术—检测技术与自动化装置]