NTP发生器生成活性物质及发射光谱研究  

Study on Active Substance Generation and Spectral Analysis in NTP Reactor

作　　者：李伟俊[1] 李小华[1] 蔡忆昔[1] 施蕴曦[1] 徐辉[1] 

机构地区：[1]江苏大学汽车与交通工程学院,江苏镇江212013

出　　处：《电子器件》2017年第4期819-823,共5页Chinese Journal of Electron Devices

基　　金：国家自然科学基金项目(51176067);江苏省"六大人才高峰"项目(2013-ZBZZ-036);江苏大学高级人才启动基金项目(13JDG055)

摘　　要：对自行设计的NTP发生器进行了性能试验,研究了电学参量、气源对活性物质生成及发射光谱的影响。结果表明,活性物质主要为O_3和NO_2,且观测到明显的N_2第2正带系谱峰。随着放电电压峰峰值或放电频率的升高,能量密度增大,O_3和NO_2浓度先增加后减小,N_2第2正带系谱峰显著,光谱强度随之增大。随着气体流量增大,能量密度减小,O_3和NO_2浓度及光谱强度均呈先增后减的趋势。随着气源中O_2含量增加,O_3和NO_2浓度增大,当O_2含量为80%时,O_3和NO_2浓度分别超过20 000×10(-6)和10 000×10(-6);光谱强度则逐渐减弱。A performance test of a NTP （Non-Thermal Plasma）reactor was conducted. Influence of electrical parameters, gas source on active substance generation and emission spectra were carried out. The results indicate that O3 and NO2 are the main products and the second positive bands of N2 could be detected. With the rise of peak-peak voltage or discharge frequency, SED（ Special Energy Density）increases while volume fractions of O3 and NO2 increase at first and decrease afterwards. At the same time,there are obvious spectral peaks at the second positive bands of N2 and its emission intensity strengthens. With the growth of gas flow, SED declines and volume fractions of O3 and NO2 and emission intensity witness an increase before they decrease. With the rise of O2 content in gas source, volume fractions of O3 and NO2 grow, among which they reach over 20 000 × 10^-6 and 10 000 × 10^-6 respectively when O2 percentage is 80% ,but emission intensity shows an opposite trend.

关 键 词：低温等离子体 O3 NO2 发射光谱 能量密度 

分 类 号：O539[理学—等离子体物理] TK421[理学—物理]