电容式角位移传感器有限元仿真及拓扑优化研究  

Research of Finite Element Simulation and Topology Optimization for Capacitive Angular Sensor

作　　者：王焕功[1] 王立平[1] 康宁民[1] 

机构地区：[1]清华大学机械工程系,北京100084

出　　处：《仪表技术与传感器》2017年第8期114-116,共3页Instrument Technique and Sensor

摘　　要：以一种高精度电容式角位移传感器的敏感元件为模型,通过有限元法分析电容式角位移传感器敏感元件在机械角度、厚度和弹性模量变化下的应变。通过分析应变结果获得传感器的测量范围,通过改变敏感元件的厚度可以扩大或缩小其测量范围。最后采用拓扑优化方法对敏感元件的机械结构进行了最优化设计,得到其拓扑最优化结构,可以对传感器敏感元件的结构设计提供参考。Sensitive element of a high precision capacitive angular displacement sensor was used as the model, the finite ele- ment method was used to analyze the strain that sensitive element of the capacitive angular displacement sensor displays under the change of mechanical angle, thickness and elastic modulus.The measurement range of the sensor was obtained through the analysis of the strain, and the measurement range can be enlarged or reduced by changing the thickness of the sensing element.Finally, the optimization design of the mechanical structure of the sensitive elements was carried out by using the topology optimization meth- od, and a new topology optimization structure was obtained which can provide reference for the structural design of the sensor＇s sensing, element.

关 键 词：有限元 电容式 角位移传感器 拓扑优化 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]