氢分子束流引入对ECR氢等离子体中离子特征的影响  

Effect of Hydrogen Addition on Ion Characteristics of Electron Cyclotron Resonance Hydrogen Plasma

作　　者：石正雨 张一川[1] 杨宽[1] 李唤[1] 朱晓东[1] 

机构地区：[1]中国科学技术大学近代物理系,合肥230026

出　　处：《真空科学与技术学报》2017年第8期809-814,共6页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金项目(批准号:11375192)

摘　　要：利用质量能量分析仪研究了微波电子回旋共振(ECR)氢等离子体的离子特征以及氢分子束流引入对离子特征的影响。在工作气压1 Pa的放电条件下,探测到了H+、H_2^+和H_3^+三种氢离子,其中H_2^+为主要离子;随放电功率的增加,探测到的离子通量增加。维持氢气放电条件不变,在工作区引入微量的氢分子束流。在束流增加的初始阶段,电子-离子的复合反应增强,探测到的三种离子通量都减小;相对于高能离子,低能区的离子数显著减少;三种离子归一化后H_2^+相对含量增加,H_3^+相对含量减少,而H^+的相对含量基本不变;相对含量的变化与不同离子-分子间碰撞的差异有关。随着氢气束流进一步增加,各种离子相对含量趋于稳定。The low pressure,high density hydrogen plasma was generated by microwave electron cyclotron resonance（ ECR） discharge. The effect of the hydrogen beam,added at 1 m L/min to the downstream plasma,on the ion density was investigated with quadrupole mass spectrometer. At 1 Pa and without H2-addition,H_1~＋,H_2~＋and H_3~＋are detected in hydrogen plasma,where H_2~＋is dominantion. As the power increased from 110 to 190 W,all the ion fluxes increased. In the initial stage of H2 addition,the fluxes of H_1~＋,H_2~＋and H_3~＋ions decreased because of increasing electron-ion recombination rate; the low-energy ion fluxes decreased much faster than the high-energy ones;H_2~＋density increased,H_3~＋density decreased while H＋density remained unchanged,possibly because of the different collision probabilities between ions and molecules. As the added H_2 concentration built up in later stage,the relative density of H_1~＋,H_2~＋and H_3~＋ions became stabilized.

关 键 词：氢等离子体 离子特征 碰撞过程 电子回旋共振等离子体 

分 类 号：O539[理学—等离子体物理]