Dark-field detection method of shallow scratches on the super-smooth optical surface based on the technology of adaptive smoothing and morphological differencing  

作　　者：李晨 杨甬英 柴惠婷 张毅晖 吴凡 周林 闫凯 白剑 沈亦兵 许乔 姜宏振 刘旭 

机构地区：[1]State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China [2]Research Center of Laser Fusion. CAEP, Mianyang 621900, China

出　　处：《Chinese Optics Letters》2017年第8期53-57,共5页中国光学快报（英文版）

基　　金：supported by the National Natural Science Foundation of China(Nos.61627825 and 11275172);the State Key Laboratory of Modern Optical Instrumentation Innovation Program(MOI)(No.MOI2015 B06)

摘　　要：In recent years, modern optical processing technologies, such as single point diamond turning, ion beam etching, and magneto-theological finishing, arc getting break- throughs. Machining precisions of super-smooth optics have also been significantly improved. However, with increasing demands for the optical surface quality,In recent years, modern optical processing technologies, such as single point diamond turning, ion beam etching, and magneto-theological finishing, arc getting break- throughs. Machining precisions of super-smooth optics have also been significantly improved. However, with increasing demands for the optical surface quality,

关 键 词：Dark-field detection method of shallow scratches on the super-smooth optical surface based on the technology of adaptive smoothing and morphological differencing 

分 类 号：TH74[机械工程—光学工程] TP391.41[机械工程—仪器科学与技术]