负偏置沉积法可控制备Cu_2O多孔纳米结构薄膜  

Controllable fabrication of Cu_2O porous nanostructured films by negative bias deposition method

作　　者：周磊[1] 诸一琦 苏江滨[1,3] 刘阳[1] 郎咸忠 蒋美萍[1] 唐斌[1] 朱贤方[3] 曾祥明 

机构地区：[1]常州大学数理学院,常州213164 [2]江苏理工学院电气信息工程学院,常州213001 [3]厦门大学物理系中国-澳大利亚功能纳米材料联合实验室,厦门361005 [4]新余学院新能源科学与工程学院,新余338004

出　　处：《科学通报》2017年第26期3050-3056,共7页Chinese Science Bulletin

基　　金：国家自然科学基金(51501018;11574255);江苏省自然科学基金(BK20150267;BK20141169);江西省教育厅科技项目(GJJ161197);江西省自然科学基金(20132BAB212005)资助

摘　　要：由于具有低成本、无毒、铜源丰富等优点,以及在气敏传感器、太阳能电池、光催化等领域的潜在应用前景,Cu_2O薄膜引起了人们的广泛关注.采用射频平衡磁控溅射镀膜系统,在薄膜沉积过程中通过施加不同衬底负偏压可控制备了Cu_2O多孔纳米结构薄膜.研究发现,所得Cu_2O薄膜具有灵活可调的孔隙度和纳米构筑单元形貌特征,并且它们与衬底负偏压的大小密切相关;薄膜沿衬底法线方向呈柱状生长且具有显著的(111)择优取向;禁带宽度在2.0~2.35 eV之间可调.很明显地,传统的溅射离子轰击、再溅射理论并不适合用来解释上述负偏压效应,因此在此基础上提出了一种负偏置沉积过程中材料原子或分子在薄膜表面选择性优先沉积机制.As one of the most common two kinds of copper oxides, cuprous oxide（Cu2O） is an important p-type transition metal oxide semiconductor material. Due to the advantages of low-cost, non-toxicity and abundant copper sources and the potential applications in the fields of gas sensors, solar cells and photocatalysts, thin films of Cu2O have attracted great interest of researchers. To enhance the performances of the above Cu2O-based surface-sensitive devices and materials, the researchers tend to prepare Cu2O thin films of porous or even nanoporous structures. However, there is still no effective method available for the controllable fabrication of Cu2O porous nanostructured films（or porous nanostructure-films, short for PNFs）, which owns not only the common features of porous thin films but also the unique properties of nanosize building units. By using a radiofrequency balanced magnetron sputtering（MS） deposition system, in this paper, Cu2O PNFs were prepared on clean glass slides by applying different negative bias voltage during film deposition. After the preparation, a field-emission scanning electron microscope（FESEM）, a grazing-incidence X-ray diffractometer（GIXRD） and an ultraviolet-visible（UV-Vis） spectrophotometer were applied subsequently for the detailed characterizations of surface morphology, texture and optical property respectively. It was observed that the as-prepared Cu2O PNFs exhibited flexible porosities and nanosize building units, which were greatly dependent on the substrate negative bias voltage. In particular, when the substrate bias voltage was kept at-50 or-150 V, the as-prepared Cu2O PNFs both demonstrated intriguing triangular pyramid-like nanostructures with distinct edges and corners on the porous film surface. Further, the side view FESEM images and the out-of-plane GIXRD spectra demonstrated a columnar growth of the Cu2O PNFs with a notable preferential orientation of（111）. The optical testing results showed that the band gap of the Cu2O PNFs obtained at diffe

关 键 词：CU2O 多孔纳米结构薄膜 平衡磁控溅射 负偏置沉积 

分 类 号：O484.1[理学—固体物理]