微腔激光器Al和Ag电极的光电学特性研究  

Study of electric and optical properties of microcavity laser with Al and Ag electrode

作　　者：姚齐峰[1] 王帅[1] 娄小平[1] 祝连庆[1] Yao Qifeng Wang Shuai Lou Xiaoping Zhu Lianqing(Beijing Engineering Research Center of Optoelectronic Information and Instruments, Beijing Information Science and Technology University, Beijing 100016, China)

机构地区：[1]北京信息科技大学光电信息与仪器北京市工程研究中心,北京100016

出　　处：《电子测量与仪器学报》2017年第8期1213-1217,共5页Journal of Electronic Measurement and Instrumentation

基　　金：国家自然科学基金面上项目-基于光纤光栅的飞机结构载荷谱构建新方法研究(54675053);长江学者和创新团队发展计划(IRT1212;光电信息与仪器);北京市重大科技计划项目(PXM2013-014224-000077;PXM2012-014224-000019)资助

摘　　要：III-V族微腔激光器中的P型金属电极通常采用的Ti-Pt-Au的合金方式,而其中的Ti层对通信波长1 550 nm的激光具有很强的吸收,不适合在高密度光子集成器件中使用。为了代替传统的合金方式,采用二维解析法计算单一金属Al和Ag金属限制下的微腔中光学模式品质因子,发现这两种新型电极具有更小损耗。另外在实验上分别制作金属Al和Ag的电极的微腔激光器,得到与理论预测一致的测试结果。由于这两种电极价格便宜,工艺简单并与CMOS工艺相容,因此在光子集成器件中具有很高的应用前景。P-type metallic electrode in III-V microcavity lasers traditionally adopt the Ti-Pt-Au alloys mode,while the Ti layer has a strong optical absorption for the laser at the communication wavelength 1 550 nm,which is not suitable for the application in photonic integration.In order to replace the traditional alloy method,this paper calculates the optical model quality factor in the microcavity under the constraints of single metal Al and Ag metal using analytical method,and found that these two new electrodes have smaller optical losses.In addition,experiments were carried out on the micro-cavity lasers with electrodes of metal Al and Ag,respectively,and the results were well consistent with the theoretical predictions.Moreover,the two electrodes are cheap,simple and compatible with CMOS process,so they have high application prospects in photonic integration.

关 键 词：微腔激光器 金属电极 光子集成 

分 类 号：TN36[电子电信—物理电子学]