纳米铝涂层制备及其对沉积态铀薄膜的防护性能研究  

Preparation and Oxidation Resistance of Nano-Al Coatings on Deposited Uranium Film

作　　者：易泰民[1] 王红莲 邢丕峰[1] 郑凤成[1] 杨蒙生[1] 高莎莎 柯博 赵利平[1] 

机构地区：[1]中国工程物理研究院,四川绵阳621900

出　　处：《稀有金属材料与工程》2017年第8期2163-2168,共6页Rare Metal Materials and Engineering

摘　　要：为探索沉积态贫铀(DU)薄膜更有效的防护层新材料与更薄的防护层制备技术,开展了纳米Al涂层的磁控溅射制备技术研究,制备了Al与DU单层、Al/DU/Al三层薄膜样品,并开展了纳米Al防护层Al/DU/Al样品大气环境下72 h的防氧化性能研究。利用扫描电镜(SEM)观察样品表面形貌,X射线光电子能谱仪(XPS)测量样品元素组成与价态变化,X射线衍射(XRD)测量样品物相组成与变化。结果表明:厚度大于10 nm即可生成连续的Al涂层,Al涂层晶粒随着厚度增加呈现长大的趋势;30 nm厚Al防护涂层有效阻止了DU薄膜大气环境的氧化:72 h内,DU层O含量没有发现明显的变化。In order to explore more effective and thinner protective coatings preparation for uranium laser targets, nano-Al coatings prepared by magnetron sputtering were researched. Single-layer of Al and DU and Al/DU/Al ＂sandwich＂ film samples were prepared, and the oxidation resistance of nano-Al coatings Al/DU/Al samples under atmosphere environment was investigated. The surface topography of these samples was characterized by SEM, atomic concentration and its change was measured by XPS, and phase composition was analyzed by XRD. Results show that Al coating becomes continuous when its thickness exceeds 10 nm. Grain size of Al coatings increases with thickness increasing. Al protective coating with 30 nm in thickness effectively prevents DU layer from oxidation, and no obvious increase of DU layer＇s oxygen content in atmosphere environment is found within 72 h.

关 键 词：AL涂层 DU薄膜 防氧化性能 

分 类 号：TG174.44[金属学及工艺—金属表面处理]