衍射光学束匀滑器件性能的空间频谱分析  

Spatial Frequency Spectrum Analysis of the Performance of the Diffractive Optical Element for Beam Smoothing

作　　者：谭峭峰[1] 严瑛白[1] 金国藩[1] 邬敏贤[1] 徐端颐[1] 

机构地区：[1]清华大学精密测试技术与仪器国家重点实验室,北京100084

出　　处：《中国激光》2002年第8期699-702,共4页Chinese Journal of Lasers

基　　金：国家高技术项目 (86 3 80 4 9 2 );国家重点基础研究项目 (973 G19990 330 );国防科技重点实验室基金试点项目(JS77 9);中国博士后科学基金资助项目

摘　　要：采用空间频谱方法分析了衍射光学束匀滑器件的焦面光强分布 ,重新定义了光能利用率及顶部不均匀性两个参数 ,由于其定义的溯源性 ,能够真实准确地评价束匀滑器件的设计性能。最后 ,采用这两个参数对精细化设计前后的衍射光学束匀滑器件性能进行了对比 。The performance of the diffractive optical element (DOE) for beam smoothing is analyzed by using the spatial frequency spectrum. Two parameters, light efficiency and top non-uniformity, are re-defined based on the spatial frequency spectrum. These two parameters can truly and exactly evaluate the performance of the DOE for beam smoothing, because their definitions go back to the origin. Finally, these two performance parameters are calculated, whether the precise design of the DOE for beam smoothing is adopted or not. The calculated results show that validity of the precision design of the DOE.

关 键 词：空间频谱 衍射光学器件 束匀滑 精细化设计 

分 类 号：O436.1[机械工程—光学工程]