脉冲激光沉积低内应力多层类金刚石膜  

Multilayer-DLC film with low inner-stress prepared by pulsed laser deposition

作　　者：陆益敏[1] 郭延龙[1] 黄国俊[1] 黎伟[1] 万强[1] 唐璜[1] 

机构地区：[1]武汉军械士官学校光电技术研究所,湖北武汉430075

出　　处：《红外与激光工程》2017年第9期275-280,共6页Infrared and Laser Engineering

基　　金：国家部委预先研究项目(51318060212)

摘　　要：为解决类金刚石膜内应力极大的问题,利用很薄的岛状结构锗层与较厚的类金刚石层循环,设计并制备了具有低内应力的多层类金刚石膜。其中,类金刚石层为主要功能膜层,起到硬质保护和光学增透的作用;而锗层作为缓冲层,起到缓解纯类金刚石膜内应力过大的问题,同时由于锗层很薄,对整个膜层的机械性能和红外特性的影响很小。测试表明,制备的多层类金刚石膜内应力为2.14 GPa,比纯类金刚石膜降低了39%,通过了GJB2485-95《光学膜层通用规范》中的重摩擦测试;同时,其纳米硬度仍保持在47 GPa的高水平。该多层类金刚石膜可以作为实际应用的红外窗口保护膜。Multilayers diamond-like carbon film, which was composed of several thick diamond-like carbon layers and thin germanium island layers, was prepared on the germanium substrate in order to resolve the high inner-stress in the diamond-like carbon film. The diamond-like carbon layers had the main function of protection, and the germanium island layers had the buffer function to reduce the inner-stress in the diamond-like carbon film. Meanwhile, the thicknesses of the germanium layers were very thin, so they had no influence on the mechanical and infrared performances of the whole film nearly. Inner-stress in the multilayers diamond-like carbon film was 2.14 GPa, 39% lower than that of the pure diamond-like carbon film, and the multilayers diamond-like carbon film could pass the friction test stipulated in the GJB2485-95＇general specification for optical coatings. The hardness of the multilayers diamond-like carbon kept high hardness of 47 GPa, and had the same surface roughness to the pure diamond-like carbon film. Therefore, the multilayers diamond-like carbon film could be used as practical protective film for infrared window.

关 键 词：脉冲激光沉积 多层类金刚石膜 锗缓冲层 低内应力 

分 类 号：TN304[电子电信—物理电子学]