一种仿生原理的矢量水听器结构设计与数值研究  

A Structure and Analysis for a MEMS Sensor Based on Bionicsprinciple

作　　者：王晓琳[1,2] 杨军 程晓斌[1,2] 

机构地区：[1]中国科学院噪声与振动重点实验室,北京100190 [2]中国科学院大学,北京100049

出　　处：《传感技术学报》2017年第9期1318-1323,共6页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(11404368)

摘　　要：受奥米亚棕蝇听觉系统特有结构的启发,提出一种能够测向的微机电(MEMS)矢量水听器设计思路,并进行了数值仿真研究。这种思路是利用MEMS表面牺牲层工艺设计一种微型差分电容检测水听器,可实现低频声源测向定位。利用COMSOL多物理场耦合仿真软件对水听器的模态和耦合放大效果进行了模拟仿真,结果显示在0°~180°范围,在谐振频率333Hz处,水听器差分电容敏感单元能够对声信号幅值差和相位差实现有效放大,显示出巨大的测向潜力。Inspired by the unique structure of the ormisochraces auditory system,a kind of microelectromechanical（ MEMS） sensor oriented for underwater location detection is proposed. This idea is to adopt MEMS surface passivation process to achieve a hydrophone based on micro differential capacitance detection forthe direction orientation of sound source in the low frequency range. The modal shapes of the hydrophone and the coupling amplification effect has been analyzedby using COMSOL Multiphysics. The numericalresults show that at the first resonance frequency of333 Hz and in the range of 0° - 180°,the differential capacitance unit can amplify acoustic signal amplitude and phase difference significantly,indicating of huge potential of direction orientationfor underwater applications.

关 键 词：微机电 奥米亚棕蝇 测向定位 

分 类 号：TH824[机械工程—仪器科学与技术]