基于Zernike多项式拟合三平面互检的误差分析  

Error Margin Analysis of Three-flat Test Based on Zernike Polynomials Fitting

作　　者：高飞[1] 李晋惠[1,2] 田爱玲[3] 刘丙才[3] 李世杰 岳鑫 

机构地区：[1]西安工业大学理学院,西安710021 [2]西安工业大学计算机科学与工程学院,西安710021 [3]西安工业大学光电工程学院,西安710021

出　　处：《光子学报》2017年第9期181-188,共8页Acta Photonica Sinica

基　　金：科技部国际合作专项(No.2015DFA10360)资助~~

摘　　要：基于Zernike多项式拟合三平面互检法,在理论上对光轴偏离、旋转角度以及有效面积对不同面型精度平面的测量误差进行了分析,并分别进行了实验验证.研究结果表明,旋转角度误差和有效面积对测量影响不敏感,可适当降低标定旋转角度成本;而光轴偏离对测量精度影响明显,在高精度面型绝对检测中应对其进行严格校准.Based on Zernike polynomials fitting,the measurement errors posed by optical axis deviation,rotation angle and active area on different types of high-precision surface were analyzed and the experimental verifications were conducted respectively.The results show that the measurement is not sensitive to the rotation angle and active area,the cost of calibrated rotation angle can therefore be reduced,while the impact of optical axis deviation on measurement precision is rather significant,which should be strictly adjusted before the test on high-precision surface.

关 键 词：光学检测 绝对检测 干涉法 ZERNIKE多项式 测量误差 计算仿真 

分 类 号：TH744.3[机械工程—光学工程]