氦质谱压力真空检漏法在高压容器检测中的优化分析  

Optimization analysis of helium mass spectrometer pressure-vacuum leak detection method for high pressure vessel detection

作　　者：王鸿雁 陈联[2] 孙冬花[2] 张瑞芳[2] 赵澜[2] 丁栋[2] 葛瑞宏[2] 

机构地区：[1]陕西省计量科学研究院,陕西西安710065 [2]兰州空间技术物理研究所真空技术与物理重点实验室,甘肃兰州730000

出　　处：《真空》2017年第5期15-18,共4页Vacuum

摘　　要：本文介绍了氦质谱压力真空检漏方法在高压容器泄漏检测中的优化分析。通过给氦质谱压力真空检漏法的集气室充气工装增加辅助抽气室,避免高压条件下充气工装泄漏造成的检漏系统本底信号过高影响,提高了氦质谱压力真空检漏方法在高压容器检测中的灵敏度和检测数据的准确性,拓展了氦质谱压力真空检漏方法的适用范围。Optimization analysis of helium mass spectrometer pressure-vacuum leak detection method for high pressure vessel detection is introduced. By adding auxiliary vacuum chamber to filling gas tool of collection chamber, the high background signal caused by the leak of filling gas tool can be avoided. It can improve the leak sensitivity and data accuracy, and expands application scope of helium mass spectrometer pressure-vacuum leak detection method.

关 键 词：泄漏检测 氦质谱分析 压力真空法 高压容器 

分 类 号：TB774[一般工业技术—真空技术]