不同气体组分的PS-PVD射流光谱诊断  

Spectroscopic Method for Diagnosing PS-PVD Jet of Different Gas Composition

作　　者：王凯[1] 刘敏 毛杰 邓子谦 文魁[1] 

机构地区：[1]中南大学材料科学与工程学院,湖南长沙410000 [2]广东省新材料研究所,现代材料表面工程技术国家工程实验室,广东省现代表面工程技术重点实验室,广东广州510651

出　　处：《光谱学与光谱分析》2017年第10期2995-2999,共5页Spectroscopy and Spectral Analysis

基　　金：广东省对外合作项目(2013B050800027);广州市对市合作项目(201508030001);广东省科学院平台建设项目(2016GDASPT-0206;2016GDASPT-0317)资助

摘　　要：采用发射光谱分析不同气体组分的等离子喷涂-物理气相沉积(PS-PVD)射流,通过Abel转换得出射流径向各点处的光谱强度,比较和分析射流中不同气体的成分分布。采用多谱线斜率法研究不同气体组分的射流在径向距离上电子温度的变化,通过Hβ谱线的stark展宽计算径向上电子密度的分布。结果表明:Ar/H_2气体中,H_2在焰流中心区域(0~30mm)分布较为均匀,但在焰流中心稍靠外的区域(30~60mm)随着径向距离的增加而增加;加入He后,Ar和H_2在焰流中心处浓度较低并在一定范围内随着径向距离的增加而增加,He往焰流中心聚集;不同气体组分的电子温度和电子密度随着径向距离的增加而降低,同时受到H_2和He的影响。Emission spectroscopy was used to analyze the plasma spray physical vapor deposition（PS-PVD）jet of different gas compositions and Abel inversion was used to calculate the spectral intensity of radial point to get the gas distributions of different gases.Multispectral line slope method was used to study the impact of radial distance and gas composition on electronic temperature.Radial distribution of electronic density was calculated by stark broadening.The results showed that：in Ar/H2 gas,H2was well-distributed in the 0-30 mm area and increased with radial distance in the 30-60mm area;After adding He gas,the concentrations of Ar and H2 were low at the centre of jet and increased with radial distance,and He gathered at the centre of plasma jet;Electronic temperature and density decreased with the increase of radial distance,at the same time,influenced by H2 and He.

关 键 词：超低压等离子体射流 发射光谱 气体组分 电子温度 电子密度 

分 类 号：O358[理学—流体力学]