Si掺杂对纳米硬质CrAlN涂层结构及性能影响  

Effect of Si doping on structure and properties of CrAlN nanometer hard coatings

作　　者：邰清安[1,2] 柳琪 国振兴[2] 王进 马大衍[1] 宋忠孝[1] 

机构地区：[1]西安交通大学材料科学与工程学院,陕西西安710049 [2]中国航发沈阳黎明航空发动机有限责任公司技术中心,辽宁沈阳110043 [3]青岛理工大学机械工程学院,山东青岛266520

出　　处：《材料热处理学报》2017年第10期119-125,共7页Transactions of Materials and Heat Treatment

摘　　要：采用真空阴极电弧离子镀技术在V-4E工具钢表面制备了CrAlN、CrAlSiN两种多元纳米硬质涂层。采用划痕仪、工具显微镜、显微硬度计、球磨仪、SEM、EDS、XRD、TEM及XPS分析了涂层的力学性能、摩擦学性能以及微结构。结果表明:与CrAlN涂层相比,CrAlSiN涂层中Si的掺杂能使晶粒细化,提高涂层硬度和耐磨性、优化膜基结合水平;CrAlSiN涂层中的立方相CrN由(111)择优取向向(200)择优取向转变,晶粒尺寸明显减小,相结构为非晶态Si_3N_4包覆纳米晶复合混合框架结构。CrAlN and CrAlSiN nanocomposite coatings were prepared on V-4E tool steel surface by vacuum cathodic arc ion plating.Mechanical properties,tribological properties and microstructure of the coatings were analyzed by means of scratches,tool microscope,microhardness tester,ball mill,SEM,EDS analysis,XRD,TEM and XPS. The results show that compared with the CrAlN coating,the doping of Si in the CrAlSiN coating can refine the grains,improve the hardness and wear resistance of the coating and optimize the binding level of the film matrix. The cubic phase CrN in the CrAlSiN coating exhibits a transformation from（ 111） preferential orientation to（ 200） preferential orientation,the grain size decreases significantly,and the phase structure of the coating shows nanocomposite hybrid frame structure embedded by amorphous Si3N4.

关 键 词：真空阴极电弧离子镀 纳米硬质涂层 晶粒细化 耐磨性 

分 类 号：TG174.44[金属学及工艺—金属表面处理]