磁悬浮平面电机的建模与仿真  

Model and Simulation of Magnetic Levitation Planar Motor

作　　者：李杨[1] 刘杨[1] 浑陆 饶裕 LI Yang LIU Yang HUN Lu RAO Yu(School of Astronautics, Harbin Institute of Technology, Harbin 150001 China)

机构地区：[1]哈尔滨工业大学航天学院,黑龙江哈尔滨150001

出　　处：《自动化技术与应用》2017年第10期108-111,共4页Techniques of Automation and Applications

基　　金：国家极大规模集成电路制造装备与成套工艺的国家重大科技专项(编号2009ZX02207)

摘　　要：磁浮平面电机是一种新型的平面电机,这种平面电机可以实现在六个自由度上的运动,可实现真空条件更适合于在光刻机中使用。本文以鱼骨型动磁式磁浮平面电机为分析目标,在充分了解电机气隙磁场的基础上,建立磁浮平面电机的磁场模型并进行仿真,以线圈在永磁磁场中的受力和力矩模型为重点,并结合鱼骨型线圈排列的特点对电机的解耦做了简要说明。将单个线圈进行一定程度的简化后,建立了单线圈在Halbach永磁阵列磁场中所受作用力和力矩的模型,并得出单线圈所受力和力矩的表达式,最终建立了一个较为完整的磁悬浮平面电机的模型。Magnetically levitated planar motor is a new actuator which can generate six DOF. It can be operated in the vacuum environment.so that it quite fit for lithography machine. The object of study is fishbone moving magnet type in the paper. Knowing the motor air gap magnet field finds a force and torque model of magnetically levitated planar motor and explains the decouple of motor by using the characteristic of fishbone coils array. A model of one-coil force and torque in the Halbach PM array magnet field is found after simplification. The expression of the force and torque model is got. By the theory of action and reaction, the stress condition of Halbach PM array is known. Finally, a complete model of magnetically levitated planar motor is found.

关 键 词：平面电机 磁浮 鱼骨型建模 磁感应强度分布 

分 类 号：TP391.9[自动化与计算机技术—计算机应用技术]