模拟浮法在线工艺制备多功能TiN镀膜玻璃  

Stimulation of TiN On-line CVD Coating on Float Glass

作　　者：鲍思权 姜宏[1,3] 赵会峰 张振华 王琦 BAO Siquan JIANG Hong ZHAO Huifeng ZHANG Zhenhua WANG Qi(Key Laboratory of Special Glass in Hainan province, Hainan University, Haikou 570228, China State Key Laboratory of Special Glass, AVIC （Hainan） Special Glass Materials Co. , LTD, Chengmai 571924, China AVIC （Hainan） Special Glass Technology, Co. , LTD, Chengmai 571924, China)

机构地区：[1]海南省特种玻璃重点实验室海南大学,海口570228 [2]特种玻璃国家重点实验室海南中航特玻材料有限公司,海南澄迈571924 [3]海南中航特玻科技有限公司,海南澄迈571924

出　　处：《材料科学与工程学报》2017年第5期752-756,847,共6页Journal of Materials Science and Engineering

基　　金：国家十二五支撑计划项目基金资助项目(2013BAJ15B00)

摘　　要：本文模拟浮法玻璃在线CVD镀膜工艺,利用常压化学气相沉积小型镀膜机,以TiCl_4和NH_3作为反应物前驱体,成功地在玻璃表面镀制一层TiN薄膜,获得了具有高阻隔紫外及反射红外的多功能镀膜玻璃。对其性能进行分析显示:随着反应物NH3流量的增加,TiN薄膜阻隔紫外线的性能逐渐提高,在近红外区的Drude型反射区域有所缩小,但其在高频近红外波段的反射率有所提高。当NH_3达到300sccm时,能够完全阻隔低于380nm的紫外线波段,反射红外线效果良好。随着基板移动速率的增大,在一定程度内可以提高薄膜对近红外线的反射能力,但阻隔紫外线的性能逐渐降低。TiN thin films were prepared by using atmosphere pressure chemical vapor deposition in a small coater. The process was to simulate an on-line coating on float glass to obtain a multifunctional coating glass with ultraviolet-shielding and infrared-reflecting performances. TIC14 and NH3 were used as precursors. The structural and optical properties of the TiN films were characterized. The results show that the ultraviolet- shielding property is improved with the flow of NH3 and the ultraviolet shorter than 380nm in wavelength is almost entirely shielded when the NH3 flow achieves 300 sccm. The Drude reflection band in near-infrared region is been narrowed, while its reflectivity increases in higher frequency region. On the other hand, the reflecting ability in near-infrared region increases with the moving speed of glass substrates, while its ultraviolet-shielding ability decreases gradually.

关 键 词：CVD镀膜工艺 化学气相沉积法 多功能镀膜玻璃 阻隔紫外线 反射红外线 

分 类 号：TQ171.73[化学工程—玻璃工业]