基于COMSOL的电容成像传感器仿真研究  

Simulation study of capacitance imaging sensor based on COMSOL software

作　　者：李振[1] 殷晓康[1] 李晨[1] 王克凡 Li Zhen Yin Xiaokang Li Chen Wang Kefan(Center for Offshore Engineering and Safety Technology, China University of Petroleum （East China）,Qingdao266580, Chin)

机构地区：[1]中国石油大学(华东)海洋油气装备与安全技术研究中心,青岛266580

出　　处：《电子测量技术》2017年第9期1-5,共5页Electronic Measurement Technology

摘　　要：针对电容成像传感器仿真分析的难点,以8极板电容成像传感器为例,建立了电容成像传感器的三维有限元仿真数学模型,详细介绍了如何使用COMSOL软件对电容成像传感器进行三维仿真,后处理结果表明8极板电容成像传感器能检测到有机玻璃内部7个不同深度的缺陷,验证了电容成像检测技术的可行性。除此之外还运用COMSOL对8极板电容成像传感器的电容值进行提取分析,并与实验结果相对比,结果表明两者的检测结果相吻合。此方法方便了电容成像检测技术正问题的研究,为运用COMSOL软件对电容成像传感器的性能分析与参数优化提供了依据。The difficulties in the simulation analysis of capacitance imaging sensor are discussed in this paper, using the eight electrode capacitance imaging sensor as an example, three dimensional finite element simulation mathematical model of capacitance sensor is established, this paper introduces how to use COMSOL software for three dimensional simulation of capacitance imaging sensor, postprocessing results show that the eight electrode capacitance imaging sensor can detect the defects in the inner surface of the glass with seven different depths, the feasibility of capacitance imaging detection technology is verified. In addition, COMSOL is used to extract and analyze the capacitance value of the eight electrode capacitance imaging sensor, and the results are compared with the experimental results. This method is convenient for the research on the problem of capacitance imaging detection technology, and provides the basis for the performance analysis and parameter optimization of the capacitance sensor using COMSOL software.

关 键 词：有限元 电容成像传感器 COMSOL 仿真 无损检测 

分 类 号：TN06[电子电信—物理电子学]