三氯氢硅除硼吸附性能研究  

Study on the Adsorption Performance of Trichlorohydrin in Addition to Boron Adsorption

作　　者：田新 于跃 吴锋 

机构地区：[1]江苏鑫华半导体材料科技有限公司,江苏徐州221004

出　　处：《山东化工》2017年第19期29-30,共2页Shandong Chemical Industry

基　　金：国家重大专项(02专项);极大规模集成电路制造技术及成套工艺(2014ZX02404)

摘　　要：利用固体吸附剂来去除三氯氢硅(TCS)中的极性杂质硼是电子级多晶硅的生产领域中是一种比较有效方法。本文利用四氯化铂作为吸附质,以层析硅胶作为载体,制备出一种载体型除硼吸附剂。并将其应用于吸附三氯氢硅中的硼杂质,考察其吸附性能。实验结果表明:制备的硅胶/四氯化铂载体型除硼吸附剂具有明显的除硼吸附效果。The use of solid adsorbents to remove polar impurity boron in TCS is a more effective method in the production field of electronic grade polysilicon.In this paper,tetrachloride was used as the adsorption material to prepare a carrier type deboron absorbent as the carrier.The adsorption properties of boron impurities in trichlorohydrin were studied.The experimental results show that the preparation of silica gel/tetrachloride carrier with boron adsorbent has obvious effect on the removal of boron adsorption.

关 键 词：三氯氢硅 载体硅胶 吸附 

分 类 号：TN304.052[电子电信—物理电子学] TQ127.2[化学工程—无机化工]