TiAlON太阳能吸收膜的制备及高温性能衰减分析  

PERPARATION OF TiAlON SOLAR ABSORBING THIN FILM AND PERFORMANCE ATTENUATION ANALYSIS OF HIGH TEMPERATURE

作　　者：许英朝 陈冠宇[1] 林洪沂 朱文章 

机构地区：[1]厦门理工学院光电与通信工程学院,厦门361024 [2]厦门理工学院光电技术与器件福建省重点实验室,厦门361024

出　　处：《太阳能学报》2017年第10期2717-2722,共6页Acta Energiae Solaris Sinica

基　　金：国家自然科学基金青年项目(11304259);福建省自然科学基金(2016J01683)

摘　　要：采用直流磁控溅射制备AlON/TiAlON(LMVF)/TiAlON(HMVF)/Cu型太阳能光谱选择性吸收薄膜,并对其光学性能及高温下的衰减机理进行研究。吸收膜沉积态的吸收比和发射比分别为0.951和0.045(100℃)。在500℃的大气气氛中热处理200 h后涂层的光学性能出现小幅衰减。主要的衰减机制为薄膜在高温下O、N和Cu发生轻微扩散及氧化。结果表明AlON/TiAlON(LMVF)/TiAlON(HMVF)/Cu型太阳能吸收膜具有良好的光学性能,可适用于CSP中高温发电及民用生活等方面。AlON/TiAlON （LMVF）/TiAlON （HMVF）/Cu solar spectrum selective absorbing film was prepared by DC magnetron sputtering method. The optical property and the attenuation mechanism at high temperatures were studied. The absorptance and emittance of the as-deposited state of absorbing film were 0.951 and 0.045 （100 ℃ ）, respectively. The optical property of the coating slightly attenuated after heat treatment in air at 500 % for 200 h. The main degradation mechanism of the thin film was because of slight diffusion and oxidation O, N and Cu. The results show that AlON/ TiAlON （LMVF）/TiAlON （HMVF）/Cu solar absorbing film has good optical property, and is suitable for high-temperature CSP power generation and domestic hot water application.

关 键 词：TiAlON薄膜 热稳定性 高温衰减 氧化 扩散 

分 类 号：TG146.23[一般工业技术—材料科学与工程]