一款基于MEMS工艺的超宽带八边形缝隙柔性天线  

An Ultra-Wideband and Flexible Octagon Slot Antenna Based on MEMS Technology

作　　者：黄成远[1] 张斌珍[1] 段俊萍[1] 王雄师[1] 白琼[1] Huang Chengyuan Zhang Binzhen Duan Junping Wang Xiongshi Bai Qiong(Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China)

机构地区：[1]中北大学电子测试技术重点实验室,太原030051

出　　处：《微纳电子技术》2017年第11期760-765,共6页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(51475438;61401405);国家自然科学基金联合基金资助项目(U1637212);山西省人社厅留学项目(20150603ZX)

摘　　要：设计了一款小型超宽带(UWB)共面波导(CPW)馈电的八边形缝隙柔性天线,可应用于超宽带无线通信系统。该天线采用了新兴柔性材料聚二甲基硅氧烷(PDMS)作为介质基板,并在PDMS介质基板的一侧单面覆铜,设计了八边形辐射单元结构和具有八边形缝隙的金属地。为降低工艺难度、简化工艺流程,采用了共面波导进行馈电,并设计了具有阻抗线性渐变功能的梯形结构的信号导带。利用电磁仿真软件对天线进行仿真优化,基于微电子机械系统(MEMS)工艺对天线进行加工制作,并进行了测试。结果表明,所设计的天线带宽达到了11.40 GHz(3.10~14.50 GHz),阻抗相对带宽约为130%,频带内电压驻波比小于2,阻抗匹配良好。测试结果与仿真结果基本一致,天线实现了超宽带工作性能。A compact ultra-wideband （UWB） and flexible octagon slot antenna fed by coplanar waveguide （CPW） was designed, which can be applied to ultra wideband wireless communication systems. The burgeoning flexible material polydimethylsiloxane （PDMS） was adopted as the die- lectric substrate of the antenna, and copper was covered only on one side of the PDMS dielectric substrate, then an octagon radiation unit and a metal ground plane with an octagon slot were fab- ricated. In order to reduce the technical difficulty and simplify the process flow, the coplanar waveguide was used to feed the antenna, and the trapezoidal frame signal conduction band with impedance linear gradient function was designed. The antenna was simulated and optimized by the electromagnetic simulation software. The antenna was fabricated based on micro-electrome- chanical system （MEMS） technology and then measured. The results show that the bandwidth of the designed antenna reaches 11.40 GHz （3.10-14. 50 GHz）, the impedance relative bandwidth is about 130%, the voltage standing wave ratio in the frequency band is less than 2, the impe- dance matching is good. The measured results are mainly consistent with the simulated results, and the ultra-wideband working performance of the antenna is realized.

关 键 词：超宽带(UWB) 共面波导(CPW) 八边形缝隙天线 柔性 微电子机械系统(MEMS) 

分 类 号：TN823.24[电子电信—信息与通信工程]