Large-range displacement measurement using sinusoidal phase-modulating laser diode interferometer  

作　　者：Ming Zhang Chang Ni Yu Zhu Leijie Wang Chuxiong Hu Jinchun Hu 张鸣;倪畅;朱煜;王磊杰;胡楚雄;胡金春(State Key Laboratory of Tribology,Department of Mechanical Engineering,Tsinghua University;Beijing Laboratory of Precision/Ultra-Precision Manufacture Equipment and Control,Tsinghua University)

机构地区：[1]State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China [2]Beijing Laboratory of Precision/Ultra-Precision Manufactzlre Equipment and Control, Tsinghua University Beijing 100084, China

出　　处：《Chinese Optics Letters》2017年第10期56-60,共5页中国光学快报（英文版）

基　　金：supported by the National Natural Science Foundation of China under Grant No.51475262

摘　　要：A signal processing method of realizing a large-range displacement measurement in a sinusoidal phase- modulating laser diode interferometer is proposed. The method of obtaining the dynamic value of the effective sinusoidal phase-modulating depth is detailed, and the residual amplitude modulation is also taken into account. Numerical simulations and experiments are carried out to compare this method with the traditional one. We prove that, with this method, the sinusoidal phase-modulating laser diode interferometer can realize a centimeter-level displacement measurement range with high precision, which is much better than the traditional method.A signal processing method of realizing a large-range displacement measurement in a sinusoidal phase- modulating laser diode interferometer is proposed. The method of obtaining the dynamic value of the effective sinusoidal phase-modulating depth is detailed, and the residual amplitude modulation is also taken into account. Numerical simulations and experiments are carried out to compare this method with the traditional one. We prove that, with this method, the sinusoidal phase-modulating laser diode interferometer can realize a centimeter-level displacement measurement range with high precision, which is much better than the traditional method.

关 键 词：Large-range displacement measurement using sinusoidal phase-modulating laser diode interferometer 

分 类 号：TH744.3[机械工程—光学工程] TN248.1[机械工程—仪器科学与技术]