离子束溅射薄膜光学常数表征的光斑效应  

Spot Effect in Optical Constant Characterization of Thin Films Fabricated by Ion Beam Sputtering

作　　者：刘华松[1,2,3] 杨霄[1] 刘丹丹[1] 姜承慧[1] 李士达[1] 季一勤[1,2,3] 张锋[1] 王利栓[1,2] 姜玉刚 陈德应[2] Liu Huasong;Yang Xiao;Liu Dandan;Jiang Chenghui;Li Shida;Ji Yiqin;Zhang Fang;Wang Lishuan;Jiang Yugang;Chen Deying(Tianjin Key Laboratory of Optical Thin Film, Tianjin Jinhang Institute of Technical Physics, Aerodynamic Technology Academy of China Aerospace Science and Industry Corp. , Tianjin 300308, China;National Key Laboratory of Science and Technology on Tunable Laser, Institute of Opto-Electronics, Harbin Institute of Technology, Harbin, Heilongjiang 150080, China;Shenzhen Aerospace Industry Technology Research Institute, China Aerospace Science and Industry Corp. , Shenzhen, Guangdong 518048, China)

机构地区：[1]中国航天科工飞航技术研究院天津津航技术物理研究所天津市薄膜光学重点实验室,天津300308 [2]哈尔滨工业大学光电子技术研究所可调谐激光技术国家重点实验室,黑龙江哈尔滨150080 [3]中国航天科工集团公司深圳航天工业技术研究院,广东深圳518048

出　　处：《光学学报》2017年第10期350-356,共7页Acta Optica Sinica

基　　金：国家自然科学基金(61405145;61235011);中国博士后科学基金(2014 M560104;2015T80115);天津市自然科学重点基金(15JCZDJC31900;13JCYBJC17300)

摘　　要：利用离子束溅射沉积制备了光学薄膜。基于椭圆偏振测量技术,研究了折射率、膜层厚度和表面层厚度与测试光斑大小的关系。研究结果表明,随着样品表面测试光斑尺寸的增加,薄膜折射率变小,膜层厚度、表面层厚度增加。使用反射光谱法和轮廓仪分别验证了各光学常数的光斑效应。研究结果表明,光学薄膜的折射率与膜层厚度具有弱横向非均匀性,采用大尺寸测量光斑能弱化这种非均匀性。Optical films are prepared by using ion beam sputtering deposition.Basing on the spectroscopic ellipsometry measurement technique,the relationship between refractive index,film layer thickness,surface layer thickness and spot size is studied.The study results show that,with the increase of tested spot size on the sample surface,the refractive index of thin films decreases,while the film layer thickness and surface layer thickness increase.The spot effects of optical constants are verified by using the reflectance spectrophotometry and the profilometer,respectively.The study results show that the refractive index and the film layer thickness have weak transverse inhomogeneity,which can be weakened by the usage of large-size tested spots.

关 键 词：薄膜 光学常数 椭圆偏振法 光斑效应 

分 类 号：TN305.8[电子电信—物理电子学]