低温等离子复合技术制备氧化铝阻氚涂层（英文）  

Preparation of Alumina Coatings as Tritium Permeation Barrier by a Composite Treatment of Low Temperature Plasma

作　　者：冯军[1] 陈美艳[2] 童洪辉[2] 金凡亚[2] 但敏[2] 许泽金[2] 沈丽如[2] 张桂凯[3] 

机构地区：[1]南华大学,湖南衡阳421001 [2]核工业西南物理研究院,四川成都610041 [3]中国工程物理研究院,四川绵阳621907

出　　处：《稀有金属材料与工程》2017年第10期2837-2841,共5页Rare Metal Materials and Engineering

基　　金：International Thermonuclear Experimental Reactor Foundation of China(2013GB110006);National Natural Science Foundation of China(11305054,11305055)

摘　　要：采用低温等离子复合技术,先后经过磁控溅射镀铝,热处理及氧离子注入,在不锈钢基体上制备了氧化铝阻氚涂层。利用XRD、SEM、EDS、AES对涂层进行了相结构、表面形貌、成分、氧元素分布等分析,并进行了划痕试验、抗热震及阻氚性能测试。结果表明:磁控溅射获得了高质量的铝涂层,热处理后形成了Fe Al合金过渡层。在氧离子注入中,当注入剂量不变电压增加时,离子注入深度增加,而氧元素分布梯度降低;当注入剂量达到8×10^(17) ions/cm^2以上时,氧元素分布变得均匀。所获得的氧化铝涂层具有较好膜/基结合力、抗热震性能及阻氚性能。经过叠加电压注入且剂量达到8×10^(17) ions/cm^2的膜层具有最好的阻氚性能,在600℃能使不锈钢的氚渗透率降低3个数量级。The alumina coatings as a tritium permeation barrier were prepared on stainless steel bulk by a composite low temperature plasma method of magnetron sputtering, heat treatment and O ion implantation. The phases, surface morphologies, chemical composition and O element distribution of the coatings were characterized by XRD, SEM, EDS and AES individually, and scratch adhesion test, thermal shock resistance and tritium permeability test were also performed. The results show that the Al coatings deposited by magnetron sputtering are well, and Fe-Al alloys interlayer is formed after heat treatment. In O ion implantation process, the oxygen depth is deepened and the oxygen density gradient decreases with higher accelerating voltage at definite doses; meanwhile it can be seen that 8×10^（17） ions/cm^2 is the crucial dose, above which the oxygen density is more homogeneous. After a series of tests, the obtained coatings have the good performance of film-substrate cohesion, thermal shock resistance and the tritium permeation resistance, and the coatings, which were treated by superposition at 8×10^（17） ions/cm^2 doses, have the best tritium permeability resistance, and the trillium permeability decreases 3 orders of magnitude compared with that of the stainless steel bulk at 600℃.

关 键 词：氧化铝涂层 阻氚 磁控溅射 离子注入 热处理 

分 类 号：TG174.4[金属学及工艺—金属表面处理]