压电超精密定位台的动态迟滞建模研究  

Dynamic hysteresis modeling of piezoelectric ultra precision positioning stage

作　　者：杨晓京[1] 李庭树 刘浩 

机构地区：[1]昆明理工大学机电工程学院,昆明650500

出　　处：《仪器仪表学报》2017年第10期2492-2499,共8页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金(51365021)项目资助

摘　　要：为了提高压电超精密定位台的建模精度,采用Backlash-Like迟滞非线性模型来描述压电超精密定位台的迟滞特性,采用基于遗传因子的递推最小二乘法来辨识Backlash-Like模型的参数,并结合压电超精密定位台的动态特性,建立了压电超精密定位台的二阶动态迟滞模型。通过实验得到,对比Backlash-Like模型,动态迟滞模型在频率为30和40 Hz时,最大输出位移误差由1.21和1.39μm下降到0.32和0.44μm,且最大相对误差分别仅为3.5%和4.4%,平均位移误差由0.53和0.76μm下降到0.17和0.21μm,平均相对误差由1.93%和3.38%下降到1.11%和1.37%。实验结果验证了提出的动态迟滞模型,既能减小了因压电超精密定位台的动态特性而引起的系统误差,又能很好地模拟其迟滞特性与动态特性,并且避免了不同频率下的模型参数反复辨识问题,提高了压电超精密定位台在高频、快速、大行程定位中的精度。该方法简单且适应性强,易于工程实现。In order to improve the modeling accuracy of piezoelectric ultra precision positioning stage,the hysteresis model of BacklashLike is used to describe the hysteresis characteristics of piezoelectric ultra precision positioning stage. The recursive least squares method based on genetic algorithm is utilized to identify the parameters of Backlash-Like model. Combined with the dynamic characteristics of the piezoelectric ultra precision positioning stage,the second-order dynamic hysteresis model is established for the piezoelectric ultra precision positioning stage. The experimental results show that,compared with the Backlash-Like model under frequencies of 30 and40 Hz,the maximum output displacement error of the dynamic hysteresis model decreases from 1. 21 and 1. 39 μm to 0. 32 and0. 44 μm,and the maximum relative error are 3. 5% and 4. 4%. The average displacement error decreases from 0. 53 and 0. 76 μm to0. 17 and 0. 21 μm,the average relative error decreases from 1. 93% and 3. 38% to 1. 11% and 1. 37%. The experimental results verify the dynamic hysteresis model and prove that the proposed model can not only reduce the system error caused by the dynamic characteristics of the piezoelectric ultra precision positioning stage, but also simulate the hysteresis characteristic and dynamic characteristic,and avoid the repeated model parameters identification under different frequencies. The accuracy of piezoelectric ultra precision positioning stage is improved in high frequency,fast,and large stroke location. This method is simple and has strong adaptability,easy to implement in engineering.

关 键 词：压电超精密定位台 Backlash-Like迟滞模型 遗传因子的递推最小二乘法 动态模型 

分 类 号：TP271.4[自动化与计算机技术—检测技术与自动化装置] TH701[自动化与计算机技术—控制科学与工程]