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作 者:吕辉[1,2] 郅富标 LUHui ZHI Fu-biao(School of Electrical Engineering and Automation, Henan Polytechnic University, Jiaozuo 454000, China School of Electronics and Information, Northwestern Polytechnical University, Xi' an 710129, China Department of Electrical Engineering, College of Industry Information Technology, Henan Province, Jiaozuo 454000, China)
机构地区:[1]河南理工大学电气工程与自动化学院,河南焦作454000 [2]西北工业大学电子信息学院,陕西西安710129 [3]河南工业和信息化职业学院电气工程系,河南焦作454000
出 处:《传感器与微系统》2017年第10期14-16,19,共4页Transducer and Microsystem Technologies
基 金:高等学校博士学科点专项科研基金资助项目(20126102110031);河南省自然科学基金资助项目(162300410123);河南省高等学校控制工程重点学科开放实验室项目(KG2016-11)
摘 要:多孔铁芯有利于满足微型磁通门传感器降低功耗的要求,但不同的拓扑结构所取得的效果不同,对多孔铁芯结构进行了拓扑分析与针对性优化,并采用微机电系统(MEMS)工艺制备了不同铁芯结构的微型磁通门进行性能测试与对比验证。实验结果证明:优化后的铁芯结构能更好地降低微型磁通门传感器功耗,提高器件整体性能。Porous core is conducive to meet the requirement of micro fluxgate sensor to reduce power consumption. But different topological structures have different effect. Topology analysis and targeted optimization of porous core are completed. The micro fluxgate based on different porous core structure are fabricated by MEMS technology. Performance testing and comparing experiment are carried out. Result shows that optimized structure of core can better reduce the power consumption of micro fluxgate sensor and improve its overall performance.
分 类 号:TP212[自动化与计算机技术—检测技术与自动化装置]
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