高可靠性压力传感器的设计与研究  

Design and Research of High Reliable Pressure Sensor

作　　者：张艳华[1] 陈玉玲[1] 史岩峰[1] 姜志国[1] 

机构地区：[1]北京强度环境研究所,北京100076

出　　处：《仪表技术与传感器》2017年第10期7-9,32,共4页Instrument Technique and Sensor

摘　　要：基于MEMS技术的压阻式压力传感器在工业领域应用广泛,传感器的可靠性设计是传感器技术的研究热点,针对汽车电子、石油化工等领域对高可靠性压力传感器的需求,提出了高可靠性压力传感器的设计方法。最后,通过可靠性强化试验对设计的传感器进行可靠性评价,试验结果表明该传感器具有极高的可靠性。Pressure sensor based on MEMS technology is widely used in industry.The reliability technology of pressure sensor is a research hotspot.To meet the requirements of high reliability in automobile electronics and petrochemical industry,a design methord of high reliability pressure sensor was proposed.Finally,the reliability of the sensor was evaluated by the reliability enhancement test,the results show that the sensor has high reliability.

关 键 词：高可靠性 压力传感器 结构设计 温度补偿 可靠性强化试验 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]