气动驱动渐变厚度变曲率反射镜技术  

Pressurization Actuation Based Variable Curvature Mirror Having Variable Thickness

作　　者：赵惠[1] 解晓蓬 许亮[1] 丁蛟腾[1] 刘美莹[1] 樊学武[1] 王亚军[1] 

机构地区：[1]中国科学院西安光学精密机械研究所空间光学应用研究室,西安710119 [2]中国科学院大学,北京100039

出　　处：《光子学报》2017年第10期100-110,共11页Acta Photonica Sinica

基　　金：中科院西部青年学者项目(No.XAB2015A09);陕西省青年科技新星项目资助~~

摘　　要：在完善基于有限元分析的跨平台综合优化流程的基础上,获得了反射镜最优结构参数,并通过21阶Zernike多项式面形拟合得到球差是导致反射镜形变过程中面形精度退化的主导像差模式.根据有限元优化得到的最优结构参数研制了第二块气动驱动渐变厚度变曲率反射镜样片(口径135mm,中心厚度8mm,初始曲率半径2 807mm)并进行了曲率变化能力及面形精度保持试验研究.研制工艺的改进使本文所研制的变厚铝合金反射镜初始面形精度优于λ/80(632.8nm),当驱动气压达到约0.07 MPa时,反射镜中心形变量接近37μm并且去掉球差影响后的面形精度可以优于λ/40(632.8nm).与前期所研制的第一块样片相比,第二块样片的中心形变能力以及面形精度保持能力均显著提升.The Finite Element Analysis（FEA）based optimization procedure aiming to obtain the optimum mirror parameters was first improved,it was found that the degradation of surface figure accuracy was mainly caused by spherical aberrations through Zernike polynomial surface fitting using 21 terms.After that,another duralumin prototype VCM（aperture 135 mm,central thickness 8 mm and initial curvature radius 2 807 mm）was fabricated and tested.Because of the improvement of the fabrication process,the initial surface figure accuracy of the second mirror is superior toλ/80（632.8 nm）.When a pressure of about 0.07 MPa is imposed,the saggigus variation reaches nearly 37μm and the corresponding surface figure accuracy is still superior toλ/40（632.8 nm）with spherical aberrations removed.Compared with the first prototype VCM,the performance of the second one has been improved prominently.

关 键 词：光学变焦 无运动部件变焦 变曲率反射镜 气动驱动 变厚 薄板弹性理论 

分 类 号：O439[机械工程—光学工程]