基于双金属膜的光纤MEMS温度传感器的设计  

A Novel Optic Fiber MEMS Temperature Sensor Based on Bimetallic Diaphragm

作　　者：姚虹春[1] 叶荣波[1] 彭波[2] 葛益娴[2] 

机构地区：[1]中国电力科学研究院,南京210036 [2]南京信息工程大学电子与信息工程学院,南京210044

出　　处：《半导体光电》2017年第5期661-664,共4页Semiconductor Optoelectronics

基　　金：国家电网科技项目(NY71-16-034);国家自然科学基金项目(61307061);江苏高校优势学科Ⅱ期建设工程项目("信息与通信工程"优势学科)

摘　　要：提出了一种新型结构的温度传感器,该传感器基于Fabry-Perot干涉和双金属效应。采用MEMS技术制作出线性度好、精度高的光纤MEMS温度传感器。阐述了传感器的工作原理,研究了传感器的力学模型,确定了温度敏感膜材料,用有限元软件ANSYS验证了模型的合理性。模拟了法珀腔的腔长对温度传感器性能的影响,为传感器的加工制作提供了理论依据。该设计可为以硅为基底的压力传感器提供一种温度补偿方法。A new type of temperature sensor is proposed based on Fabry-Perot interference and bimetallic effect.MEMS technology and existing optical fiber communication equipments were used to produce a fiber MEMS temperature sensor with simple process,good linearity and high precision.The working principles of the sensor were described,the mechanical model of the sensor was studied,the bimetallic material was determined,and the rationality of the model was verified by finite element software ANSYS.The relationship between cavity length and contrast was simulated by FP cavity interference theory,which provides a theoretical basis for the process and production of sensors.

关 键 词：光纤传感器 法布里-珀罗干涉 台面膜 双金属膜 

分 类 号：TN212.11[电子电信—物理电子学]