红外显微热成像系统研究及应用  

Research and Applications of Infrared Thermal Microscope Imaging System

作　　者：岳静静[1,2,3] 吴之茂 木二珍 罗宏 姜杰 胡志宇[1,2,3] 

机构地区：[1]上海交通大学微米/纳米加工技术国家重点实验室,上海200240 [2]上海交通大学纳微能源研究所,上海200240 [3]上海交通大学微纳电子学系,上海200240 [4]云南北方驰宏光电有限公司,云南昆明650217

出　　处：《红外技术》2017年第11期973-978,共6页Infrared Technology

基　　金：云南省科技厅省院省校科技合作专项(2014IB007);国家自然科学基金(5177060654);云南省胡志宇专家工作站(编号:云科合发[2014]5号)

摘　　要：红外显微热成像系统基于红外热成像、红外图像处理和光学显微技术,能够分析微小物体或局部细节的温度变化,具有无损检测、灵敏度高等优点。对红外显微热成像系统的研究背景进行了概括,介绍了它的基本原理和系统组成,总结了红外显微热成像系统的研究现状及其在微电子器件检测、医学诊断、科学实验研究等方面的应用进展,对其存在的问题进行了分析,并且展望了红外显微热成像系统的未来发展趋势。The infrared thermal microscope imaging system is based on technologies of infrared thermal imaging, infrared image processing, and optical microscopy. Such a system can be used to analyze temperature changes of tiny objects or local details, with advantages of non-destructive testing, high sensitivity and so on. The research background of the infrared thermal microscope imaging system is summarized in this article, and the fundamentals and system components are presented. In addition, we summarized the research status of the infrared thermal microscope imaging system and its applications in the field of microelectronic device testing, medical diagnosis, and scientific experiment research. Moreover, the existing problems of the infrared thermal microscope imaging system are analyzed, and its future development trend is forecasted.

关 键 词：红外热成像 红外探测器 红外显微热成像系统 

分 类 号：TN219[电子电信—物理电子学]